Influence of annealing condition on the properties of sputtered hafnium oxide

Seok Woo Nam, Jung Ho Yoo, Suheun Nam, Hyo Jick Choi, Dongwon Lee, Dae Hong Ko, Joo Ho Moon, Ja Hum Ku, Siyoung Choi

Research output: Contribution to journalArticlepeer-review

55 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Influence of annealing condition on the properties of sputtered hafnium oxide'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy