Influence of in-situ surface treatment of Ir electrode before metal-organic chemical vapor deposition of Pb(Zr0.2,Ti0.8)O3 thin films in the self-regulation window

Keun Lee; Hyun Ju Lee; Gun Hwan Kim; Cheol Seong Hwang

doi:10.1109/ISAF.2007.4393204

Influence of in-situ surface treatment of Ir electrode before metal-organic chemical vapor deposition of Pb(Zr_0.2,Ti_0.8)O₃ thin films in the self-regulation window

Keun Lee, Hyun Ju Lee, Gun Hwan Kim, Cheol Seong Hwang

School of System & Semiconductor Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The influence of in-situ surface treatment of Ir electrode before metal-organic chemical vapor deposition of Pb(Zr_0.2Ti _0.8)O₃ (PZT) thin films on the self-regulation process window [constant Pb concentration in the film irrespective of the precursor input ratio (Pb/(Zr+Ti)] was investigated. The effect of the various process parameteres, such as the pretreatment of Ir electrode, susceptor and chamber wall cleaning, and total precursor flow rate on the self-regulation window was investigated. Prevention of iridium oxide formation by Ar pre-treatment was crucial to improve ferroelectric performances of PZT films within the self-regulation process window.

Original language	English
Title of host publication	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Pages	172-175
Number of pages	4
DOIs	https://doi.org/10.1109/ISAF.2007.4393204
Publication status	Published - 2007
Event	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan Duration: 2007 May 27 → 2007 May 31

Publication series

Name	IEEE International Symposium on Applications of Ferroelectrics

Conference

Conference	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Country/Territory	Japan
City	Nara-city
Period	07/5/27 → 07/5/31

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Access to Document

10.1109/ISAF.2007.4393204

Cite this

Lee, K., Lee, H. J., Kim, G. H., & Hwang, C. S. (2007). Influence of in-situ surface treatment of Ir electrode before metal-organic chemical vapor deposition of Pb(Zr_0.2,Ti_0.8)O₃ thin films in the self-regulation window. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF (pp. 172-175). [4393204] (IEEE International Symposium on Applications of Ferroelectrics). https://doi.org/10.1109/ISAF.2007.4393204

Lee, Keun ; Lee, Hyun Ju ; Kim, Gun Hwan et al. / Influence of in-situ surface treatment of Ir electrode before metal-organic chemical vapor deposition of Pb(Zr_0.2,Ti_0.8)O₃ thin films in the self-regulation window. 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. pp. 172-175 (IEEE International Symposium on Applications of Ferroelectrics).

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title = "Influence of in-situ surface treatment of Ir electrode before metal-organic chemical vapor deposition of Pb(Zr0.2,Ti0.8)O3 thin films in the self-regulation window",

abstract = "The influence of in-situ surface treatment of Ir electrode before metal-organic chemical vapor deposition of Pb(Zr0.2Ti 0.8)O3 (PZT) thin films on the self-regulation process window [constant Pb concentration in the film irrespective of the precursor input ratio (Pb/(Zr+Ti)] was investigated. The effect of the various process parameteres, such as the pretreatment of Ir electrode, susceptor and chamber wall cleaning, and total precursor flow rate on the self-regulation window was investigated. Prevention of iridium oxide formation by Ar pre-treatment was crucial to improve ferroelectric performances of PZT films within the self-regulation process window.",

author = "Keun Lee and Lee, {Hyun Ju} and Kim, {Gun Hwan} and Hwang, {Cheol Seong}",

year = "2007",

doi = "10.1109/ISAF.2007.4393204",

language = "English",

isbn = "1424413338",

series = "IEEE International Symposium on Applications of Ferroelectrics",

pages = "172--175",

booktitle = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF",

note = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF ; Conference date: 27-05-2007 Through 31-05-2007",

}

Lee, K, Lee, HJ, Kim, GH & Hwang, CS 2007, Influence of in-situ surface treatment of Ir electrode before metal-organic chemical vapor deposition of Pb(Zr_0.2,Ti_0.8)O₃ thin films in the self-regulation window. in 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF., 4393204, IEEE International Symposium on Applications of Ferroelectrics, pp. 172-175, 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF, Nara-city, Japan, 07/5/27. https://doi.org/10.1109/ISAF.2007.4393204

Influence of in-situ surface treatment of Ir electrode before metal-organic chemical vapor deposition of Pb(Zr_0.2,Ti_0.8)O₃ thin films in the self-regulation window. / Lee, Keun; Lee, Hyun Ju; Kim, Gun Hwan et al.

2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. p. 172-175 4393204 (IEEE International Symposium on Applications of Ferroelectrics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AB - The influence of in-situ surface treatment of Ir electrode before metal-organic chemical vapor deposition of Pb(Zr0.2Ti 0.8)O3 (PZT) thin films on the self-regulation process window [constant Pb concentration in the film irrespective of the precursor input ratio (Pb/(Zr+Ti)] was investigated. The effect of the various process parameteres, such as the pretreatment of Ir electrode, susceptor and chamber wall cleaning, and total precursor flow rate on the self-regulation window was investigated. Prevention of iridium oxide formation by Ar pre-treatment was crucial to improve ferroelectric performances of PZT films within the self-regulation process window.

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Lee K, Lee HJ, Kim GH, Hwang CS. Influence of in-situ surface treatment of Ir electrode before metal-organic chemical vapor deposition of Pb(Zr_0.2,Ti_0.8)O₃ thin films in the self-regulation window. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. p. 172-175. 4393204. (IEEE International Symposium on Applications of Ferroelectrics). doi: 10.1109/ISAF.2007.4393204