Influence of incorporating rare earth metals on the Schottky barrier height of Ni silicide

Ying Ying Zhang, Soon Yen Jung, Jungwoo Oh, Hong Sik Shin, Se Kyung Oh, Jin Suk Wang, Prashant Majhi, Raj Jammy, Hi Deok Lee

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

Characterized herein is a different physical mechanism for the formation of Ni silicide by incorporating rare earth (RE) metals such as ytterbium (Yb), erbium (Er), and dysprosium (Dy). Although the incorporation of any RE metal increases the Schottky barrier height (SBH) for holes in Ni silicide due to the formation of a ternary phase silicide, Yb induced the greatest increase in SBH because, unlike the other metals, Yb atoms accumulated at the silicide/silicon interface.

Original languageEnglish
Pages (from-to)557011-557013
Number of pages3
JournalJapanese journal of applied physics
Volume49
Issue number5 PART 1
DOIs
Publication statusPublished - 2010 May

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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