Characterized herein is a different physical mechanism for the formation of Ni silicide by incorporating rare earth (RE) metals such as ytterbium (Yb), erbium (Er), and dysprosium (Dy). Although the incorporation of any RE metal increases the Schottky barrier height (SBH) for holes in Ni silicide due to the formation of a ternary phase silicide, Yb induced the greatest increase in SBH because, unlike the other metals, Yb atoms accumulated at the silicide/silicon interface.
|Number of pages||3|
|Journal||Japanese journal of applied physics|
|Issue number||5 PART 1|
|Publication status||Published - 2010 May|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)