Lead zirconate titanate (PZT) thin films with highly (1 0 0)- and (1 1 1)-preferred orientation are obtained successfully through the control of bottom electrode orientation. The films are investigated in terms of the effect of crystalline orientation on the electric and ferroelectric properties and the microstructure. The differences in electrical properties between (1 0 0)- and (1 1 1)-preferred PZT films are discussed from the viewpoint of the relationship between external field and polarization direction. From the XRD patterns of before and after fatigue, the distortion of crystal structure in (1 0 0)-preferred PZT was observed. From all the above results, we proposed that the grains having (1 0 0) orientation are one of the causes of fatigue.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films