Influence of substrate temperature on the electrical and optical properties of Ga-doped ZnO thin films fabricated by continuous composition spread

Keun Jung; Won Kook Choi; Seok Jin Yoon; Hyun Jae Kim; Ji Won Choi

doi:10.1016/j.ceramint.2011.05.107

Influence of substrate temperature on the electrical and optical properties of Ga-doped ZnO thin films fabricated by continuous composition spread

Keun Jung, Won Kook Choi, Seok Jin Yoon, Hyun Jae Kim, Ji Won Choi

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

The electrical and optical properties of Ga-doped ZnO (GZO) thin films deposited at different substrate temperatures have been studied by a continuous composition spread (CCS) method. The full range of GZO compositions deposited at different substrate temperatures was explored to find excellent electrical and optical properties. Optimized GZO thin films with a low resistivity of 9.6 × 10 ^-4 Ω cm and an average transmittance above 89% in the 400-700 nm wavelength regions were able to be formed at a substrate temperature of 100°C. Optimized composition of the GZO thin film which had the lowest resistivity and highest transmittance was found at 0.8 wt% Ga ₂O ₃ doped ZnO.

Original language	English
Pages (from-to)	S605-S608
Journal	Ceramics International
Volume	38
Issue number	SUPPL. 1
DOIs	https://doi.org/10.1016/j.ceramint.2011.05.107
Publication status	Published - 2012 Jan

Bibliographical note

Funding Information:
This study was supported by “a grant-in-aid for R&D program (No. 10030068)” funded by the Ministry of Knowledge Economy and “the R&D program for Core Converging Research Center Program (no. 2009-0082023 )” funded by the Ministry of Education, Science and Technology, Republic of Korea.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Process Chemistry and Technology
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.ceramint.2011.05.107

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@article{87a2e29cd95d42959db3eeb82e75c160,

title = "Influence of substrate temperature on the electrical and optical properties of Ga-doped ZnO thin films fabricated by continuous composition spread",

abstract = "The electrical and optical properties of Ga-doped ZnO (GZO) thin films deposited at different substrate temperatures have been studied by a continuous composition spread (CCS) method. The full range of GZO compositions deposited at different substrate temperatures was explored to find excellent electrical and optical properties. Optimized GZO thin films with a low resistivity of 9.6 × 10 -4 Ω cm and an average transmittance above 89% in the 400-700 nm wavelength regions were able to be formed at a substrate temperature of 100°C. Optimized composition of the GZO thin film which had the lowest resistivity and highest transmittance was found at 0.8 wt% Ga 2O 3 doped ZnO.",

author = "Keun Jung and Choi, {Won Kook} and Yoon, {Seok Jin} and Kim, {Hyun Jae} and Choi, {Ji Won}",

note = "Funding Information: This study was supported by “a grant-in-aid for R&D program (No. 10030068)” funded by the Ministry of Knowledge Economy and “the R&D program for Core Converging Research Center Program (no. 2009-0082023 )” funded by the Ministry of Education, Science and Technology, Republic of Korea.",

year = "2012",

month = jan,

doi = "10.1016/j.ceramint.2011.05.107",

language = "English",

volume = "38",

pages = "S605--S608",

journal = "Ceramics International",

issn = "0272-8842",

publisher = "Elsevier Limited",

number = "SUPPL. 1",

}

TY - JOUR

T1 - Influence of substrate temperature on the electrical and optical properties of Ga-doped ZnO thin films fabricated by continuous composition spread

AU - Jung, Keun

AU - Choi, Won Kook

AU - Yoon, Seok Jin

AU - Kim, Hyun Jae

AU - Choi, Ji Won

N1 - Funding Information: This study was supported by “a grant-in-aid for R&D program (No. 10030068)” funded by the Ministry of Knowledge Economy and “the R&D program for Core Converging Research Center Program (no. 2009-0082023 )” funded by the Ministry of Education, Science and Technology, Republic of Korea.

PY - 2012/1

Y1 - 2012/1

N2 - The electrical and optical properties of Ga-doped ZnO (GZO) thin films deposited at different substrate temperatures have been studied by a continuous composition spread (CCS) method. The full range of GZO compositions deposited at different substrate temperatures was explored to find excellent electrical and optical properties. Optimized GZO thin films with a low resistivity of 9.6 × 10 -4 Ω cm and an average transmittance above 89% in the 400-700 nm wavelength regions were able to be formed at a substrate temperature of 100°C. Optimized composition of the GZO thin film which had the lowest resistivity and highest transmittance was found at 0.8 wt% Ga 2O 3 doped ZnO.

AB - The electrical and optical properties of Ga-doped ZnO (GZO) thin films deposited at different substrate temperatures have been studied by a continuous composition spread (CCS) method. The full range of GZO compositions deposited at different substrate temperatures was explored to find excellent electrical and optical properties. Optimized GZO thin films with a low resistivity of 9.6 × 10 -4 Ω cm and an average transmittance above 89% in the 400-700 nm wavelength regions were able to be formed at a substrate temperature of 100°C. Optimized composition of the GZO thin film which had the lowest resistivity and highest transmittance was found at 0.8 wt% Ga 2O 3 doped ZnO.

UR - http://www.scopus.com/inward/record.url?scp=84655162079&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84655162079&partnerID=8YFLogxK

U2 - 10.1016/j.ceramint.2011.05.107

DO - 10.1016/j.ceramint.2011.05.107

M3 - Article

AN - SCOPUS:84655162079

SN - 0272-8842

VL - 38

SP - S605-S608

JO - Ceramics International

JF - Ceramics International

IS - SUPPL. 1

ER -

Influence of substrate temperature on the electrical and optical properties of Ga-doped ZnO thin films fabricated by continuous composition spread

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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