Influence of substrate temperature on the electrical and optical properties of Ga-doped ZnO thin films fabricated by continuous composition spread

Keun Jung, Won Kook Choi, Seok Jin Yoon, Hyun Jae Kim, Ji Won Choi

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13 Citations (Scopus)

Abstract

The electrical and optical properties of Ga-doped ZnO (GZO) thin films deposited at different substrate temperatures have been studied by a continuous composition spread (CCS) method. The full range of GZO compositions deposited at different substrate temperatures was explored to find excellent electrical and optical properties. Optimized GZO thin films with a low resistivity of 9.6 × 10 -4 Ω cm and an average transmittance above 89% in the 400-700 nm wavelength regions were able to be formed at a substrate temperature of 100°C. Optimized composition of the GZO thin film which had the lowest resistivity and highest transmittance was found at 0.8 wt% Ga 2O 3 doped ZnO.

Original languageEnglish
Pages (from-to)S605-S608
JournalCeramics International
Volume38
Issue numberSUPPL. 1
DOIs
Publication statusPublished - 2012 Jan 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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