Influence of TiAs precipitate formation on morphology degradation of the TiSi2/As-doped polysilicon system

Hyung Ho Park, Jeong Yong Lee, Kyoung Ik Cho, Mun Cheol Paek, Oh Joon Kwon, Chi Kyu Choi, Kee Soo Nam

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy