Influence of upper layer on measurement of thermal conductivity using differential 3 omega method

Han Na Cho, Sang Woo Shin, Hyung Hee Cho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The thermal conductivity of silicon dioxide thin film covered by additional protective layer, silicon nitride, is measured by differential 3 omega method. This method needs the deposited metal line as a heater on the thin film of interest, but the upper layer should be inserted inevitably between heater and thin film in some cases; when the thin film is a welloxidized material or an electrically conductive material, the additional layer is need as a protective layer against oxidation or a insulator from current leakage. However, the verification of using differential 3 omega method for these cases had not conducted. In this paper, using differential 3ω method is verified to be reliable when the thermal conductivity of thin film with protective layer is measured as long as the conditions of the upper layer are satisfied and the requirements are proposed. Experiments show that the error of measurement experiment increases as the aspect ratio between upper layer thickness and heater rises i.e., the thickness of the upper layer increases.

Original languageEnglish
Title of host publication38th AIAA Thermophysics Conference
Publication statusPublished - 2005 Dec 1
Event38th AIAA Thermophysics Conference - Toronto, ON, Canada
Duration: 2005 Jun 62005 Jun 9

Other

Other38th AIAA Thermophysics Conference
CountryCanada
CityToronto, ON
Period05/6/605/6/9

Fingerprint

Thermal conductivity
thermal conductivity
Thin films
heaters
thin films
Conductive materials
Silicon nitride
Leakage currents
Aspect ratio
Experiments
Silica
Oxidation
silicon nitrides
aspect ratio
Metals
leakage
insulators
silicon dioxide
requirements
oxidation

All Science Journal Classification (ASJC) codes

  • Aerospace Engineering
  • Mechanical Engineering
  • Condensed Matter Physics

Cite this

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title = "Influence of upper layer on measurement of thermal conductivity using differential 3 omega method",
abstract = "The thermal conductivity of silicon dioxide thin film covered by additional protective layer, silicon nitride, is measured by differential 3 omega method. This method needs the deposited metal line as a heater on the thin film of interest, but the upper layer should be inserted inevitably between heater and thin film in some cases; when the thin film is a welloxidized material or an electrically conductive material, the additional layer is need as a protective layer against oxidation or a insulator from current leakage. However, the verification of using differential 3 omega method for these cases had not conducted. In this paper, using differential 3ω method is verified to be reliable when the thermal conductivity of thin film with protective layer is measured as long as the conditions of the upper layer are satisfied and the requirements are proposed. Experiments show that the error of measurement experiment increases as the aspect ratio between upper layer thickness and heater rises i.e., the thickness of the upper layer increases.",
author = "Cho, {Han Na} and Shin, {Sang Woo} and Cho, {Hyung Hee}",
year = "2005",
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Cho, HN, Shin, SW & Cho, HH 2005, Influence of upper layer on measurement of thermal conductivity using differential 3 omega method. in 38th AIAA Thermophysics Conference. 38th AIAA Thermophysics Conference, Toronto, ON, Canada, 05/6/6.

Influence of upper layer on measurement of thermal conductivity using differential 3 omega method. / Cho, Han Na; Shin, Sang Woo; Cho, Hyung Hee.

38th AIAA Thermophysics Conference. 2005.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AU - Shin, Sang Woo

AU - Cho, Hyung Hee

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N2 - The thermal conductivity of silicon dioxide thin film covered by additional protective layer, silicon nitride, is measured by differential 3 omega method. This method needs the deposited metal line as a heater on the thin film of interest, but the upper layer should be inserted inevitably between heater and thin film in some cases; when the thin film is a welloxidized material or an electrically conductive material, the additional layer is need as a protective layer against oxidation or a insulator from current leakage. However, the verification of using differential 3 omega method for these cases had not conducted. In this paper, using differential 3ω method is verified to be reliable when the thermal conductivity of thin film with protective layer is measured as long as the conditions of the upper layer are satisfied and the requirements are proposed. Experiments show that the error of measurement experiment increases as the aspect ratio between upper layer thickness and heater rises i.e., the thickness of the upper layer increases.

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