Influence of upper layer on measuring thermal conductivity of multilayer thin films using differential 3-ω method

Sangwoo Shin, Han Na Cho, Beom Seok Kim, Hyung Hee Cho

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

We present an intrinsic error in differential 3-ω measurement method due to two-dimensional heat spreading effect in the upper layer of the target film. By measuring thermal conductivities of 300 nm PECVD-grown silicon dioxide thin films with various thicknesses of upper layers, significant heat spreading effect is observed. Also, analytical modeling regarding apparent thin film thermal conductivity is conducted for verification of experimental results. Experimental results as well as analytical results show that the measurement error tends to increase with thickness of upper layer due to two-dimensional heat spreading effect.

Original languageEnglish
Pages (from-to)933-936
Number of pages4
JournalThin Solid Films
Volume517
Issue number2
DOIs
Publication statusPublished - 2008 Nov 28

Fingerprint

Multilayer films
Thermal effects
Thermal conductivity
thermal conductivity
Thin films
heat
thin films
Plasma enhanced chemical vapor deposition
Measurement errors
Silicon Dioxide
Silica
silicon dioxide

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

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abstract = "We present an intrinsic error in differential 3-ω measurement method due to two-dimensional heat spreading effect in the upper layer of the target film. By measuring thermal conductivities of 300 nm PECVD-grown silicon dioxide thin films with various thicknesses of upper layers, significant heat spreading effect is observed. Also, analytical modeling regarding apparent thin film thermal conductivity is conducted for verification of experimental results. Experimental results as well as analytical results show that the measurement error tends to increase with thickness of upper layer due to two-dimensional heat spreading effect.",
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Influence of upper layer on measuring thermal conductivity of multilayer thin films using differential 3-ω method. / Shin, Sangwoo; Cho, Han Na; Kim, Beom Seok; Cho, Hyung Hee.

In: Thin Solid Films, Vol. 517, No. 2, 28.11.2008, p. 933-936.

Research output: Contribution to journalArticle

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AB - We present an intrinsic error in differential 3-ω measurement method due to two-dimensional heat spreading effect in the upper layer of the target film. By measuring thermal conductivities of 300 nm PECVD-grown silicon dioxide thin films with various thicknesses of upper layers, significant heat spreading effect is observed. Also, analytical modeling regarding apparent thin film thermal conductivity is conducted for verification of experimental results. Experimental results as well as analytical results show that the measurement error tends to increase with thickness of upper layer due to two-dimensional heat spreading effect.

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