Initial Growth Characteristics of Gold Thin Films by a Nozzle Beam and Ion-Assisted Deposition

Seok Kyun Song, Seok Keun Koh, Deuk Yeon Lee, Hong Koo Baik

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The electrical conductance characteristics due to tunneling of Au films on glass substrates as a function of deposition rate and Ar+ ion current density have been investigated by in situ measurement. The onset thickness for conductance was 8.5-29 Å lower than that obtained by other researchers due to the use of a nozzle beam in this study. The degree of agglomeration, t, attained its maximum value at a deposition rate R = 1.0 Å/s. The degree of coalescence increased with increasing deposition rate. The onset thickness for conductance decreased to a nearly linear line with increasing ion beam irradiation.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume43
Issue number1 A/B
DOIs
Publication statusPublished - 2004 Jan 15

Fingerprint

Deposition rates
nozzles
Nozzles
Gold
gold
Thin films
Ions
thin films
ions
agglomeration
in situ measurement
Coalescence
coalescing
Ion beams
ion currents
Current density
Agglomeration
ion beams
Irradiation
current density

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

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abstract = "The electrical conductance characteristics due to tunneling of Au films on glass substrates as a function of deposition rate and Ar+ ion current density have been investigated by in situ measurement. The onset thickness for conductance was 8.5-29 {\AA} lower than that obtained by other researchers due to the use of a nozzle beam in this study. The degree of agglomeration, t, attained its maximum value at a deposition rate R = 1.0 {\AA}/s. The degree of coalescence increased with increasing deposition rate. The onset thickness for conductance decreased to a nearly linear line with increasing ion beam irradiation.",
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Initial Growth Characteristics of Gold Thin Films by a Nozzle Beam and Ion-Assisted Deposition. / Song, Seok Kyun; Koh, Seok Keun; Lee, Deuk Yeon; Baik, Hong Koo.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 43, No. 1 A/B, 15.01.2004.

Research output: Contribution to journalArticle

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AU - Baik, Hong Koo

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