Ink-jet-printed zinctinoxide thin-film transistors and circuits with rapid thermal annealing process

Yong Hoon Kim; Kwang Ho Kim; Min Suk Oh; Hyun Jae Kim; Jeong In Han; Min Koo Han; Sung Kyu Park

doi:10.1109/LED.2010.2051404

Ink-jet-printed zinctinoxide thin-film transistors and circuits with rapid thermal annealing process

Yong Hoon Kim, Kwang Ho Kim, Min Suk Oh, Hyun Jae Kim, Jeong In Han, Min Koo Han, Sung Kyu Park

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Abstract

We report on high-performance ink-jet-printed amorphous zinctinoxide (α-ZTO) thin-film transistors (TFTs) and simple inverter circuits. The solution-processed α-ZTO layer was directly printed on source/drain electrodes and then thermally treated by using rapid thermal annealing process. The ink-jet-printed α-ZTO TFTs (W/L =100μm/10\μm) have shown a carrier mobility of 4.98 cm²Vs with an on/off current ratio that is greater than 10⁹ and a subthreshold slope of 0.92 V/dec. The α-ZTO TFT-based inverter operation was good with acceptable logic level conservation.

Original language	English
Article number	5503990
Pages (from-to)	836-838
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	31
Issue number	8
DOIs	https://doi.org/10.1109/LED.2010.2051404
Publication status	Published - 2010 Aug

Bibliographical note

Funding Information:
Manuscript received May 4, 2010; revised May 18, 2010; accepted May 18, 2010. Date of publication July 8, 2010; date of current version July 23, 2010. This work was supported by Grant F0004023-2009-32 from the Information Display R&D Center, one of the 21st Century Frontier R&D Programs funded by the Ministry of Knowledge Economy of the Korean Government. The review of this letter was arranged by Editor J. K. O. Sin.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Access to Document

10.1109/LED.2010.2051404

Cite this

@article{1e948ebeb3b642a7a208f4dbc0cb1f54,

title = "Ink-jet-printed zinctinoxide thin-film transistors and circuits with rapid thermal annealing process",

abstract = "We report on high-performance ink-jet-printed amorphous zinctinoxide (α-ZTO) thin-film transistors (TFTs) and simple inverter circuits. The solution-processed α-ZTO layer was directly printed on source/drain electrodes and then thermally treated by using rapid thermal annealing process. The ink-jet-printed α-ZTO TFTs (W/L =100μm/10\μm) have shown a carrier mobility of 4.98 cm2Vs with an on/off current ratio that is greater than 109 and a subthreshold slope of 0.92 V/dec. The α-ZTO TFT-based inverter operation was good with acceptable logic level conservation.",

author = "Kim, {Yong Hoon} and Kim, {Kwang Ho} and Oh, {Min Suk} and Kim, {Hyun Jae} and Han, {Jeong In} and Han, {Min Koo} and Park, {Sung Kyu}",

note = "Funding Information: Manuscript received May 4, 2010; revised May 18, 2010; accepted May 18, 2010. Date of publication July 8, 2010; date of current version July 23, 2010. This work was supported by Grant F0004023-2009-32 from the Information Display R&D Center, one of the 21st Century Frontier R&D Programs funded by the Ministry of Knowledge Economy of the Korean Government. The review of this letter was arranged by Editor J. K. O. Sin.",

year = "2010",

month = aug,

doi = "10.1109/LED.2010.2051404",

language = "English",

volume = "31",

pages = "836--838",

journal = "IEEE Electron Device Letters",

issn = "0741-3106",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "8",

}

TY - JOUR

T1 - Ink-jet-printed zinctinoxide thin-film transistors and circuits with rapid thermal annealing process

AU - Kim, Yong Hoon

AU - Kim, Kwang Ho

AU - Oh, Min Suk

AU - Kim, Hyun Jae

AU - Han, Jeong In

AU - Han, Min Koo

AU - Park, Sung Kyu

N1 - Funding Information: Manuscript received May 4, 2010; revised May 18, 2010; accepted May 18, 2010. Date of publication July 8, 2010; date of current version July 23, 2010. This work was supported by Grant F0004023-2009-32 from the Information Display R&D Center, one of the 21st Century Frontier R&D Programs funded by the Ministry of Knowledge Economy of the Korean Government. The review of this letter was arranged by Editor J. K. O. Sin.

PY - 2010/8

Y1 - 2010/8

N2 - We report on high-performance ink-jet-printed amorphous zinctinoxide (α-ZTO) thin-film transistors (TFTs) and simple inverter circuits. The solution-processed α-ZTO layer was directly printed on source/drain electrodes and then thermally treated by using rapid thermal annealing process. The ink-jet-printed α-ZTO TFTs (W/L =100μm/10\μm) have shown a carrier mobility of 4.98 cm2Vs with an on/off current ratio that is greater than 109 and a subthreshold slope of 0.92 V/dec. The α-ZTO TFT-based inverter operation was good with acceptable logic level conservation.

AB - We report on high-performance ink-jet-printed amorphous zinctinoxide (α-ZTO) thin-film transistors (TFTs) and simple inverter circuits. The solution-processed α-ZTO layer was directly printed on source/drain electrodes and then thermally treated by using rapid thermal annealing process. The ink-jet-printed α-ZTO TFTs (W/L =100μm/10\μm) have shown a carrier mobility of 4.98 cm2Vs with an on/off current ratio that is greater than 109 and a subthreshold slope of 0.92 V/dec. The α-ZTO TFT-based inverter operation was good with acceptable logic level conservation.

UR - http://www.scopus.com/inward/record.url?scp=77955175430&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77955175430&partnerID=8YFLogxK

U2 - 10.1109/LED.2010.2051404

DO - 10.1109/LED.2010.2051404

M3 - Article

AN - SCOPUS:77955175430

SN - 0741-3106

VL - 31

SP - 836

EP - 838

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 8

M1 - 5503990

ER -

Ink-jet-printed zinctinoxide thin-film transistors and circuits with rapid thermal annealing process

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this