Inkjet-printed InGaZnO thin film transistor

Gun Hee Kim, Hyun Soo Kim, Hyun Soo Shin, Byun Du Ahn, Kyung Ho Kim, Hyun Jae Kim

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144 Citations (Scopus)

Abstract

We report inkjet-printed InGaZnO (IGZO) thin film transistors (TFTs). IGZO ink was prepared by dissolving indium nitrate hydrate, gallium nitrate hydrate and zinc acetate dihydrate into 2-methoxyethanol with additional stabilizers. The resulting films were inkjet-printed with a resolution of 300 dots per inch using droplets with a diameter of 40 μm, and a volume of 35 pl. The films exhibited high optical transparency in the visible range and had a polycrystalline phase of InGaO3(ZnO)2 after thermal annealing treatment. The chemical composition of this IGZO sample was also determined, and shown to have high stoichiometric characteristics of low oxygen deficiency. The TFTs with a conventional inverted staggered structure using inkjet-printed IGZO as an active channel layer had a field-effect mobility of ~ 0.03 cm2/Vs in saturation region and an on-to-off current ratio greater than ~ 104.

Original languageEnglish
Pages (from-to)4007-4010
Number of pages4
JournalThin Solid Films
Volume517
Issue number14
DOIs
Publication statusPublished - 2009 May 29

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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    Kim, G. H., Kim, H. S., Shin, H. S., Ahn, B. D., Kim, K. H., & Kim, H. J. (2009). Inkjet-printed InGaZnO thin film transistor. Thin Solid Films, 517(14), 4007-4010. https://doi.org/10.1016/j.tsf.2009.01.151