Inorganic-organic hybrid materials for application in optical devices

R. Houbertz, G. Domann, C. Cronauer, A. Schmitt, H. Martin, Jang-Ung Park, L. Fröhlich, R. Buestrich, M. Popall, U. Streppel, P. Dannberg, C. Wächter, A. Bräuer

Research output: Contribution to journalConference article

158 Citations (Scopus)

Abstract

Integrated passive and active optical devices are the key components in current and future data transfer technologies. In order to fulfill future requirements in miniaturization for diffractive, refractive and integrated optical devices, new materials with higher thermal stability and a better compatibility to processing techniques used in conventional semiconductor devices production are needed. Inorganic-organic hybrid polymers (ORMOCER ®s) produced at fairly low costs with a high degree of reproducibility are now proven candidates. The materials can be functionalized such that their physical and chemical properties can be tailored towards, e.g. optical applications on wafer-scale such as waveguides, gratings or microoptical devices. The materials behave as a negative resist and can thus be patterned by UV exposure with good resolution. Besides, the materials are very well suited for thin and thick film packaging technology. We here particularly focus on materials for optical (telecom/microoptics) applications. The optical behavior is characterized and discussed with respect to the chemical functionalities. Additionally, some application examples of selected optical components are given, produced either by UV lithography or by replication technology.

Original languageEnglish
Pages (from-to)194-200
Number of pages7
JournalThin Solid Films
Volume442
Issue number1-2
DOIs
Publication statusPublished - 2003 Oct 1
EventSelected Papers from the 4th International COnference on Coating - Braunschweig, Germany
Duration: 2002 Nov 32002 Nov 7

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Hybrid materials
Optical devices
miniaturization
semiconductor devices
packaging
chemical properties
compatibility
thick films
Microoptics
thermal stability
lithography
physical properties
wafers
gratings
waveguides
Data transfer
Semiconductor devices
requirements
Thick films
Chemical properties

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Houbertz, R., Domann, G., Cronauer, C., Schmitt, A., Martin, H., Park, J-U., ... Bräuer, A. (2003). Inorganic-organic hybrid materials for application in optical devices. Thin Solid Films, 442(1-2), 194-200. https://doi.org/10.1016/S0040-6090(03)00982-9
Houbertz, R. ; Domann, G. ; Cronauer, C. ; Schmitt, A. ; Martin, H. ; Park, Jang-Ung ; Fröhlich, L. ; Buestrich, R. ; Popall, M. ; Streppel, U. ; Dannberg, P. ; Wächter, C. ; Bräuer, A. / Inorganic-organic hybrid materials for application in optical devices. In: Thin Solid Films. 2003 ; Vol. 442, No. 1-2. pp. 194-200.
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Houbertz, R, Domann, G, Cronauer, C, Schmitt, A, Martin, H, Park, J-U, Fröhlich, L, Buestrich, R, Popall, M, Streppel, U, Dannberg, P, Wächter, C & Bräuer, A 2003, 'Inorganic-organic hybrid materials for application in optical devices', Thin Solid Films, vol. 442, no. 1-2, pp. 194-200. https://doi.org/10.1016/S0040-6090(03)00982-9

Inorganic-organic hybrid materials for application in optical devices. / Houbertz, R.; Domann, G.; Cronauer, C.; Schmitt, A.; Martin, H.; Park, Jang-Ung; Fröhlich, L.; Buestrich, R.; Popall, M.; Streppel, U.; Dannberg, P.; Wächter, C.; Bräuer, A.

In: Thin Solid Films, Vol. 442, No. 1-2, 01.10.2003, p. 194-200.

Research output: Contribution to journalConference article

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AU - Houbertz, R.

AU - Domann, G.

AU - Cronauer, C.

AU - Schmitt, A.

AU - Martin, H.

AU - Park, Jang-Ung

AU - Fröhlich, L.

AU - Buestrich, R.

AU - Popall, M.

AU - Streppel, U.

AU - Dannberg, P.

AU - Wächter, C.

AU - Bräuer, A.

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AB - Integrated passive and active optical devices are the key components in current and future data transfer technologies. In order to fulfill future requirements in miniaturization for diffractive, refractive and integrated optical devices, new materials with higher thermal stability and a better compatibility to processing techniques used in conventional semiconductor devices production are needed. Inorganic-organic hybrid polymers (ORMOCER ®s) produced at fairly low costs with a high degree of reproducibility are now proven candidates. The materials can be functionalized such that their physical and chemical properties can be tailored towards, e.g. optical applications on wafer-scale such as waveguides, gratings or microoptical devices. The materials behave as a negative resist and can thus be patterned by UV exposure with good resolution. Besides, the materials are very well suited for thin and thick film packaging technology. We here particularly focus on materials for optical (telecom/microoptics) applications. The optical behavior is characterized and discussed with respect to the chemical functionalities. Additionally, some application examples of selected optical components are given, produced either by UV lithography or by replication technology.

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Houbertz R, Domann G, Cronauer C, Schmitt A, Martin H, Park J-U et al. Inorganic-organic hybrid materials for application in optical devices. Thin Solid Films. 2003 Oct 1;442(1-2):194-200. https://doi.org/10.1016/S0040-6090(03)00982-9