Integrated arrays of air-dielectric graphene transistors as transparent active-matrix pressure sensors for wide pressure ranges

Sung Ho Shin, Sangyoon Ji, Seiho Choi, Kyoung Hee Pyo, Byeong Wan An, Jihun Park, Joohee Kim, Ju Young Kim, Ki Suk Lee, Soon Yong Kwon, Jaeyeong Heo, Byong Guk Park, Jang Ung Park

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Abstract

Integrated electronic circuitries with pressure sensors have been extensively researched as a key component for emerging electronics applications such as electronic skins and health-monitoring devices. Although existing pressure sensors display high sensitivities, they can only be used for specific purposes due to the narrow range of detectable pressure (under tens of kPa) and the difficulty of forming highly integrated arrays. However, it is essential to develop tactile pressure sensors with a wide pressure range in order to use them for diverse application areas including medical diagnosis, robotics or automotive electronics. Here we report an unconventional approach for fabricating fully integrated active-matrix arrays of pressure-sensitive graphene transistors with air-dielectric layers simply formed by folding two opposing panels. Furthermore, this realizes a wide tactile pressure sensing range from 250 Pa to â1/43 MPa. Additionally, fabrication of pressure sensor arrays and transparent pressure sensors are demonstrated, suggesting their substantial promise as next-generation electronics.

Original languageEnglish
Article number14950
JournalNature communications
Volume8
DOIs
Publication statusPublished - 2017 Mar 31

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Biochemistry, Genetics and Molecular Biology(all)
  • Physics and Astronomy(all)

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    Shin, S. H., Ji, S., Choi, S., Pyo, K. H., Wan An, B., Park, J., Kim, J., Kim, J. Y., Lee, K. S., Kwon, S. Y., Heo, J., Park, B. G., & Park, J. U. (2017). Integrated arrays of air-dielectric graphene transistors as transparent active-matrix pressure sensors for wide pressure ranges. Nature communications, 8, [14950]. https://doi.org/10.1038/ncomms14950