Integrated arrays of air-dielectric graphene transistors as transparent active-matrix pressure sensors for wide pressure ranges

Sung Ho Shin, Sangyoon Ji, Seiho Choi, Kyoung Hee Pyo, Byeong Wan An, Jihun Park, Joohee Kim, Ju Young Kim, Ki Suk Lee, Soon Yong Kwon, Jaeyeong Heo, Byong Guk Park, Jang Ung Park

Research output: Contribution to journalArticlepeer-review

106 Citations (Scopus)

Abstract

Integrated electronic circuitries with pressure sensors have been extensively researched as a key component for emerging electronics applications such as electronic skins and health-monitoring devices. Although existing pressure sensors display high sensitivities, they can only be used for specific purposes due to the narrow range of detectable pressure (under tens of kPa) and the difficulty of forming highly integrated arrays. However, it is essential to develop tactile pressure sensors with a wide pressure range in order to use them for diverse application areas including medical diagnosis, robotics or automotive electronics. Here we report an unconventional approach for fabricating fully integrated active-matrix arrays of pressure-sensitive graphene transistors with air-dielectric layers simply formed by folding two opposing panels. Furthermore, this realizes a wide tactile pressure sensing range from 250 Pa to â1/43 MPa. Additionally, fabrication of pressure sensor arrays and transparent pressure sensors are demonstrated, suggesting their substantial promise as next-generation electronics.

Original languageEnglish
Article number14950
JournalNature communications
Volume8
DOIs
Publication statusPublished - 2017 Mar 31

Bibliographical note

Funding Information:
This work was supported by the Ministry of Science, ICT & Future Planning and the Ministry of Trade, Industry and Energy (MOTIE) of Korea through the National Research Foundation (2016R1A2B3013592 and 2016R1A5A1009926), the Technology Innovation Program (Grant 10044410), the Nano Material Technology Development Program (2015M3A7B4050308 and 2016M3A7B4910635), the Convergence Technology Development Program for Bionic Arm (NRF-2014M3C1B2048198), the Pioneer Research Center Program (NRF-2014M3C1A3001208), the Human Resource Training Program for Regional Innovation and Creativity (NRF-2014H1C1A1073051). Also, the authors thank financial support by Samsung Display and the Development Program of Manufacturing Technology for Flexible Electronics with High Performance (SC0970) funded by the Korea Institute of Machinery and Materials, and by the Development Program of Internet of Nature System (1.150090.01) funded by UNIST.

Publisher Copyright:
© The Author(s) 2017.

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Biochemistry, Genetics and Molecular Biology(all)
  • Physics and Astronomy(all)

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