Integrated arrays of air-dielectric graphene transistors as transparent active-matrix pressure sensors for wide pressure ranges

Sung Ho Shin, Sangyoon Ji, Seiho Choi, Kyoung Hee Pyo, Byeong Wan An, Jihun Park, Joohee Kim, Ju Young Kim, Ki Suk Lee, Soon Yong Kwon, Jaeyeong Heo, Byong Guk Park, Jang-Ung Park

Research output: Contribution to journalArticle

61 Citations (Scopus)

Abstract

Integrated electronic circuitries with pressure sensors have been extensively researched as a key component for emerging electronics applications such as electronic skins and health-monitoring devices. Although existing pressure sensors display high sensitivities, they can only be used for specific purposes due to the narrow range of detectable pressure (under tens of kPa) and the difficulty of forming highly integrated arrays. However, it is essential to develop tactile pressure sensors with a wide pressure range in order to use them for diverse application areas including medical diagnosis, robotics or automotive electronics. Here we report an unconventional approach for fabricating fully integrated active-matrix arrays of pressure-sensitive graphene transistors with air-dielectric layers simply formed by folding two opposing panels. Furthermore, this realizes a wide tactile pressure sensing range from 250 Pa to â1/43 MPa. Additionally, fabrication of pressure sensor arrays and transparent pressure sensors are demonstrated, suggesting their substantial promise as next-generation electronics.

Original languageEnglish
Article number14950
JournalNature communications
Volume8
DOIs
Publication statusPublished - 2017 Mar 31

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Pressure sensors
pressure sensors
graphene
transistors
Air
Pressure
air
matrices
electronics
Electronic equipment
Automobile electronic equipment
Touch
Sensor arrays
robotics
folding
health
emerging
Skin
Robotics

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Biochemistry, Genetics and Molecular Biology(all)
  • Physics and Astronomy(all)

Cite this

Shin, Sung Ho ; Ji, Sangyoon ; Choi, Seiho ; Pyo, Kyoung Hee ; Wan An, Byeong ; Park, Jihun ; Kim, Joohee ; Kim, Ju Young ; Lee, Ki Suk ; Kwon, Soon Yong ; Heo, Jaeyeong ; Park, Byong Guk ; Park, Jang-Ung. / Integrated arrays of air-dielectric graphene transistors as transparent active-matrix pressure sensors for wide pressure ranges. In: Nature communications. 2017 ; Vol. 8.
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abstract = "Integrated electronic circuitries with pressure sensors have been extensively researched as a key component for emerging electronics applications such as electronic skins and health-monitoring devices. Although existing pressure sensors display high sensitivities, they can only be used for specific purposes due to the narrow range of detectable pressure (under tens of kPa) and the difficulty of forming highly integrated arrays. However, it is essential to develop tactile pressure sensors with a wide pressure range in order to use them for diverse application areas including medical diagnosis, robotics or automotive electronics. Here we report an unconventional approach for fabricating fully integrated active-matrix arrays of pressure-sensitive graphene transistors with air-dielectric layers simply formed by folding two opposing panels. Furthermore, this realizes a wide tactile pressure sensing range from 250 Pa to {\^a}1/43 MPa. Additionally, fabrication of pressure sensor arrays and transparent pressure sensors are demonstrated, suggesting their substantial promise as next-generation electronics.",
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Shin, SH, Ji, S, Choi, S, Pyo, KH, Wan An, B, Park, J, Kim, J, Kim, JY, Lee, KS, Kwon, SY, Heo, J, Park, BG & Park, J-U 2017, 'Integrated arrays of air-dielectric graphene transistors as transparent active-matrix pressure sensors for wide pressure ranges', Nature communications, vol. 8, 14950. https://doi.org/10.1038/ncomms14950

Integrated arrays of air-dielectric graphene transistors as transparent active-matrix pressure sensors for wide pressure ranges. / Shin, Sung Ho; Ji, Sangyoon; Choi, Seiho; Pyo, Kyoung Hee; Wan An, Byeong; Park, Jihun; Kim, Joohee; Kim, Ju Young; Lee, Ki Suk; Kwon, Soon Yong; Heo, Jaeyeong; Park, Byong Guk; Park, Jang-Ung.

In: Nature communications, Vol. 8, 14950, 31.03.2017.

Research output: Contribution to journalArticle

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AU - Wan An, Byeong

AU - Park, Jihun

AU - Kim, Joohee

AU - Kim, Ju Young

AU - Lee, Ki Suk

AU - Kwon, Soon Yong

AU - Heo, Jaeyeong

AU - Park, Byong Guk

AU - Park, Jang-Ung

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