Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing

Youngkee Eun, Jae Ik Lee, Jungwook Choi, Youngsup Song, Jongbaeg Kim

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

CNT arrays are used as removable dry adhesives for high-temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self-assembled CNTs is utilized to strain the microstructures in high-temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.

Original languageEnglish
Pages (from-to)4285-4289
Number of pages5
JournalAdvanced Materials
Volume23
Issue number37
DOIs
Publication statusPublished - 2011 Oct 4

Fingerprint

Carbon Nanotubes
Silicon
Carbon nanotubes
Adhesives
Processing
Temperature
Adhesion
Fabrication
Microstructure

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Eun, Youngkee ; Lee, Jae Ik ; Choi, Jungwook ; Song, Youngsup ; Kim, Jongbaeg. / Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing. In: Advanced Materials. 2011 ; Vol. 23, No. 37. pp. 4285-4289.
@article{f176b670ec2d4f2fb1e6af69a32c56a5,
title = "Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing",
abstract = "CNT arrays are used as removable dry adhesives for high-temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self-assembled CNTs is utilized to strain the microstructures in high-temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.",
author = "Youngkee Eun and Lee, {Jae Ik} and Jungwook Choi and Youngsup Song and Jongbaeg Kim",
year = "2011",
month = "10",
day = "4",
doi = "10.1002/adma.201102331",
language = "English",
volume = "23",
pages = "4285--4289",
journal = "Advanced Materials",
issn = "0935-9648",
publisher = "Wiley-VCH Verlag",
number = "37",

}

Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing. / Eun, Youngkee; Lee, Jae Ik; Choi, Jungwook; Song, Youngsup; Kim, Jongbaeg.

In: Advanced Materials, Vol. 23, No. 37, 04.10.2011, p. 4285-4289.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing

AU - Eun, Youngkee

AU - Lee, Jae Ik

AU - Choi, Jungwook

AU - Song, Youngsup

AU - Kim, Jongbaeg

PY - 2011/10/4

Y1 - 2011/10/4

N2 - CNT arrays are used as removable dry adhesives for high-temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self-assembled CNTs is utilized to strain the microstructures in high-temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.

AB - CNT arrays are used as removable dry adhesives for high-temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self-assembled CNTs is utilized to strain the microstructures in high-temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.

UR - http://www.scopus.com/inward/record.url?scp=80054681039&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80054681039&partnerID=8YFLogxK

U2 - 10.1002/adma.201102331

DO - 10.1002/adma.201102331

M3 - Article

VL - 23

SP - 4285

EP - 4289

JO - Advanced Materials

JF - Advanced Materials

SN - 0935-9648

IS - 37

ER -