Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing

Youngkee Eun, Jae Ik Lee, Jungwook Choi, Youngsup Song, Jongbaeg Kim

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

CNT arrays are used as removable dry adhesives for high-temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self-assembled CNTs is utilized to strain the microstructures in high-temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.

Original languageEnglish
Pages (from-to)4285-4289
Number of pages5
JournalAdvanced Materials
Volume23
Issue number37
DOIs
Publication statusPublished - 2011 Oct 4

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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