Integrated solenoid-type inductors for high frequency applications and their characteristics

Yong Jun Kim, Mark G. Allen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Citations (Scopus)

Abstract

New solenoid-type integrated inductors for high frequency applications have been realized using a surface micromachining technique and a polymer sacrificial layer, and their geometrical characteristic have been investigated. In general, integrated inductors can suffer from low Q factors and/or self-resonant frequencies when compared to their discrete counterparts. A spiral-type inductor, one of the dominant choices as an integrated inductor, requires relatively large two-dimensional spaces. In addition, the direction of flux of the spiral type inductor is perpendicular to the substrate, which can cause more interference with underlying circuitry or other integrated passives in a vertically stacked multi-chip modules (MCM). The proposed inductor in this research has an air core to reduce unwanted stray capacitance that can be added due to a magnetic core, and electroplated copper coil to reduce the series resistance. An important feature of the proposed inductor geometry is introducing an air gap between the substrate and the conductor coil in order to reduce the effects of the substrate dielectric constant. This air gap can be realized using a polyimide sacrificial layer and a surface micromachining technique. Therefore, the resulting inductor can have less substrate-dependent magnetic properties, less stray capacitance, and higher Q-factor. Inductors with different geometrical aspects, such as air gap height, core size, and number of turns, have been designed and fabricated on ceramic substrates. A variational study of these inductors has been performed to assess the impact of the geometrical aspects to the inductor performance at high frequency. The measured inductance of these inductors varies from 2 nH to 20 nH, and maximum Q-factor 10-60.

Original languageEnglish
Title of host publicationProceedings - Electronic Components and Technology Conference
Pages1247-1252
Number of pages6
DOIs
Publication statusPublished - 1998 Jan 1
EventProceedings of the 1998 48th Electronic Components & Technology Conference - Seattle, WA, USA
Duration: 1998 May 251998 May 28

Other

OtherProceedings of the 1998 48th Electronic Components & Technology Conference
CitySeattle, WA, USA
Period98/5/2598/5/28

Fingerprint

Solenoids
Substrates
Surface micromachining
Air
Capacitance
Magnetic cores
Polyimides
Inductance
Copper
Natural frequencies
Magnetic properties
Polymers
Permittivity
Fluxes
Geometry

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Kim, Y. J., & Allen, M. G. (1998). Integrated solenoid-type inductors for high frequency applications and their characteristics. In Proceedings - Electronic Components and Technology Conference (pp. 1247-1252) https://doi.org/10.1109/ECTC.1998.678896
Kim, Yong Jun ; Allen, Mark G. / Integrated solenoid-type inductors for high frequency applications and their characteristics. Proceedings - Electronic Components and Technology Conference. 1998. pp. 1247-1252
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Kim, YJ & Allen, MG 1998, Integrated solenoid-type inductors for high frequency applications and their characteristics. in Proceedings - Electronic Components and Technology Conference. pp. 1247-1252, Proceedings of the 1998 48th Electronic Components & Technology Conference, Seattle, WA, USA, 98/5/25. https://doi.org/10.1109/ECTC.1998.678896

Integrated solenoid-type inductors for high frequency applications and their characteristics. / Kim, Yong Jun; Allen, Mark G.

Proceedings - Electronic Components and Technology Conference. 1998. p. 1247-1252.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Kim YJ, Allen MG. Integrated solenoid-type inductors for high frequency applications and their characteristics. In Proceedings - Electronic Components and Technology Conference. 1998. p. 1247-1252 https://doi.org/10.1109/ECTC.1998.678896