Integrated total-NOX-evaluation-chip for simultaneous conversion and detection of noX in air

S. I. Yoon, H. R. Ahn, J. Yoon, S. Song, Y. J. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An integrated Total-NOx-Evaluation-Chip (TNEC) is being proposed for real-time and point-of-interest evaluation of total NOx in air. It consists of a Micro-Electric-NOx -Converter (μENC) and a Thermoelectric-Gas-Sensor(TGS). In the μENC, the NOx is treated with a corona-discharge. Then, in the TGS, the treated NOx is detected by using a catalytic reaction and a thermoelectric effect. The fabricated TNEC electrically converted NOx mixture from various mixing-rates to a fixed-mixing-rate of about 25%, and detected it with the sensitivity of 4.65×10-2μV/ppm.

Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages897-899
Number of pages3
DOIs
Publication statusPublished - 2011 Apr 13
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

Fingerprint

Electric converters
Chemical sensors
chips
Thermoelectricity
converters
evaluation
air
Air
electric corona
sensors
gases
sensitivity

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Yoon, S. I., Ahn, H. R., Yoon, J., Song, S., & Kim, Y. J. (2011). Integrated total-NOX-evaluation-chip for simultaneous conversion and detection of noX in air. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 897-899). [5734570] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734570
Yoon, S. I. ; Ahn, H. R. ; Yoon, J. ; Song, S. ; Kim, Y. J. / Integrated total-NOX-evaluation-chip for simultaneous conversion and detection of noX in air. 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. pp. 897-899 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
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abstract = "An integrated Total-NOx-Evaluation-Chip (TNEC) is being proposed for real-time and point-of-interest evaluation of total NOx in air. It consists of a Micro-Electric-NOx -Converter (μENC) and a Thermoelectric-Gas-Sensor(TGS). In the μENC, the NOx is treated with a corona-discharge. Then, in the TGS, the treated NOx is detected by using a catalytic reaction and a thermoelectric effect. The fabricated TNEC electrically converted NOx mixture from various mixing-rates to a fixed-mixing-rate of about 25{\%}, and detected it with the sensitivity of 4.65×10-2μV/ppm.",
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Yoon, SI, Ahn, HR, Yoon, J, Song, S & Kim, YJ 2011, Integrated total-NOX-evaluation-chip for simultaneous conversion and detection of noX in air. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734570, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 897-899, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 11/1/23. https://doi.org/10.1109/MEMSYS.2011.5734570

Integrated total-NOX-evaluation-chip for simultaneous conversion and detection of noX in air. / Yoon, S. I.; Ahn, H. R.; Yoon, J.; Song, S.; Kim, Y. J.

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 897-899 5734570 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Yoon SI, Ahn HR, Yoon J, Song S, Kim YJ. Integrated total-NOX-evaluation-chip for simultaneous conversion and detection of noX in air. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 897-899. 5734570. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734570