Integrated total-NOX-evaluation-chip for simultaneous conversion and detection of noX in air

S. I. Yoon, H. R. Ahn, J. Yoon, S. Song, Y. J. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An integrated Total-NOx-Evaluation-Chip (TNEC) is being proposed for real-time and point-of-interest evaluation of total NOx in air. It consists of a Micro-Electric-NOx -Converter (μENC) and a Thermoelectric-Gas-Sensor(TGS). In the μENC, the NOx is treated with a corona-discharge. Then, in the TGS, the treated NOx is detected by using a catalytic reaction and a thermoelectric effect. The fabricated TNEC electrically converted NOx mixture from various mixing-rates to a fixed-mixing-rate of about 25%, and detected it with the sensitivity of 4.65×10-2μV/ppm.

Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages897-899
Number of pages3
DOIs
Publication statusPublished - 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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