Interface control of Y 2O 3 thin film with Si(100) in a metal-(ferroelectric)-insulator-semiconductor structure

Chang Ki Lee, Hyung Ho Park

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Interface control of Y 2O 3 thin film with Si(100) in a metal-(ferroelectric)-insulator-semiconductor structure'. Together they form a unique fingerprint.

Engineering

Chemistry

Material Science