Interfacial reactions in the thin film Y2O3 on chemically oxidized Si(100) substrate systems

Sung Kwan Kang, Dae Hong Ko, Eun Ha Kim, Mann-Ho Cho, C. N. Whang

Research output: Contribution to journalArticle

44 Citations (Scopus)

Abstract

We investigated the interfacial reaction between ICB deposited Y2O3 film and chemically oxidized (100) silicon substrates upon annealing in Ar and O2 gas ambients using transmission electron microscopy (TEM) and X-ray diffractometry (XRD). We observed the growth of the SiO2 layer between the Y2O3 films and the Si substrate after annealing treatments in O2 gas and Ar gas ambients. The growth of the SiO2 layer is due to the diffusion of the oxygen species through Y2O3 films, and subsequent reaction with the silicon substrates. We also found that yttrium silicate layer is formed between the SiO2 layer and Y2O3 films upon annealing treatments.

Original languageEnglish
Pages (from-to)8-11
Number of pages4
JournalThin Solid Films
Volume353
Issue number1
DOIs
Publication statusPublished - 1999 Sep 29

Fingerprint

Surface chemistry
Thin films
Gases
Silicon
Substrates
Annealing
thin films
annealing
gases
silicon
Yttrium
yttrium
X ray diffraction analysis
Silicates
silicates
Oxygen
Transmission electron microscopy
transmission electron microscopy
oxygen
x rays

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

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abstract = "We investigated the interfacial reaction between ICB deposited Y2O3 film and chemically oxidized (100) silicon substrates upon annealing in Ar and O2 gas ambients using transmission electron microscopy (TEM) and X-ray diffractometry (XRD). We observed the growth of the SiO2 layer between the Y2O3 films and the Si substrate after annealing treatments in O2 gas and Ar gas ambients. The growth of the SiO2 layer is due to the diffusion of the oxygen species through Y2O3 films, and subsequent reaction with the silicon substrates. We also found that yttrium silicate layer is formed between the SiO2 layer and Y2O3 films upon annealing treatments.",
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Interfacial reactions in the thin film Y2O3 on chemically oxidized Si(100) substrate systems. / Kang, Sung Kwan; Ko, Dae Hong; Kim, Eun Ha; Cho, Mann-Ho; Whang, C. N.

In: Thin Solid Films, Vol. 353, No. 1, 29.09.1999, p. 8-11.

Research output: Contribution to journalArticle

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T1 - Interfacial reactions in the thin film Y2O3 on chemically oxidized Si(100) substrate systems

AU - Kang, Sung Kwan

AU - Ko, Dae Hong

AU - Kim, Eun Ha

AU - Cho, Mann-Ho

AU - Whang, C. N.

PY - 1999/9/29

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