Internal-field-dependent low-frequency piezoelectric energy harvesting characteristics of in situ processed Nb-doped Pb(Zr,Ti)O3 thin-film cantilevers

Chan Su Han, Kaihua Liu, Ji Ho Kim, Dong Heon Kang, Yong Soo Cho

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1 Citation (Scopus)


Piezoelectric thin-film-based cantilevers have been investigated for higher energy-harvesting performance with simplified processing steps. Here, a simple in situ film deposition process of heavily Nb-doped lead zirconate titanate (PZT) films, which does not require annealing and poling, has been demonstrated to verify the possibility of use of the resultant films as energy-harvesters specifically for low frequency vibrating sources. The in situ domain formation of the films during the deposition was demonstrated from the apparent shifts of the capacitance-electric field curves, indicating the presence of internal electric fields. The so-called imprint behavior was found to be directly related to the performance of piezoelectric energy harvesting. As an optimal example, 12 mol% Nb-doped cantilever harvesters that showed the largest imprint behavior exhibited the best values of ∼19.1 GPa figure-of-merit and ∼1436 μWcm−3g−2 power density, which are competitive compared to other reported values.

Original languageEnglish
Pages (from-to)898-903
Number of pages6
JournalJournal of Alloys and Compounds
Publication statusPublished - 2019 Apr 15

Bibliographical note

Funding Information:
This work was financially supported by a grant (NRF- 2016M3A7B4910151 ) of the National Research Foundation of Korea and by the Industrial Strategic Technology Development Program ( #10079981 ) funded by the Ministry of Trade, Industry & Energy (MOTIE) of Korea.

Publisher Copyright:
© 2018 Elsevier B.V.

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry


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