Investigation of Ge profile on SiGe islands by scanning photoelectron microscopy

M. H. Cho, Y. J. Cho, M. K. Lee, S. A. Park, Y. S. Roh, Y. K. Kim, K. Jeong, S. K. Kang, D. H. Ko, H. J. Shin, K. W. Kwon

Research output: Contribution to journal › Article › peer-review

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