Investigation of optical and compositional properties of thin SiN x:H films with an enhanced growth rate by high frequency PECVD method

Min Jung Lee, Joyti Prakash Kar, Tae Il Lee, Dongwon Lee, Dae Kyu Choi, Joong Hwee Cho, Jae Min Myoung

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3 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy