Investigation of oxide layer removal mechanism using reactive gases

Hyun Tae Kim, Jung Soo Lim, Min Su Kim, Hoon Jung Oh, Dae Hong Ko, Gyoo Dong Kim, Woo Gon Shin, Jin Goo Park

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemistry