Investigation on the compositionally graded HfxAl yOz films for TiN based DRAM capacitor

Deok Sin Kil, Kwon Hong, Seung Jin Yeom, Han Sang Song, Ki Seon Park, Jae Sung Roh, Noh Jung Kwak, Hyun Cheol Sohn, Jin Woong Kim, Sung Wook Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution


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Engineering & Materials Science