Investigation on the interface formation of ambient-pressure-dried SiO2 aerogel film deposited on GaAs

Sung Woo Park, Sang Bae Jung, Min Gu Kang, Hae Suk Jung, Hyung Ho Park, Haecheon Kim

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

The interfacial state between ambient-pressure-dried aerogel and GaAs has been examined with specific emphasis on the solvent of modification. Trimethylchlorosilane (TMCS), being widely used to modify aerogel, was shown to be inadaptable due to its constitutional chlorine, which formed HCl and then etched GaAs oxides on GaAs surface. The interface of GaAs with aerogel was roughly etched from the reflection of surface microstructure of aerogel. Therefore, surface modification of aerogel with TMCS induced a great damage to interfacial GaAs surface, resulted in the change of surface characteristics of GaAs, and finally induced cracks and a collapse of aerogel fractal structure. On the contrary, hexamethyldisilazane, another modifying agent for aerogel surface, represented a relatively good interfacial state, while aerogel could be successfully formed on GaAs substrate.

Original languageEnglish
Pages (from-to)155-159
Number of pages5
JournalVacuum
Volume67
Issue number1
DOIs
Publication statusPublished - 2002 Sep 2
Event2nd International Seminar On Semiconductor Surface Passivation (SSP'2001) - Ustron, Poland
Duration: 2001 Sep 102001 Sep 13

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All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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