Ion bombardment-induced transformation process on SiNx surfaces to achieve vertical alignment of liquid crystal molecules

Byoung Yong Kim, Won Kyu Lee, Young Hwan Kim, Hong Gyu Park, Tae Kyu Park, Dae Shik Seo

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


The vertical alignment (VA) of liquid crystal display (LCD) devices with upgraded performance is achieved on ion-bombarded SiNx surfaces. We used a plasma-enhanced chemical vapour deposition method to deposit SiNx thin films with high reliability. X-ray photoelectron spectroscopy revealed that change of orientation of LC molecules occurs on the SiO2 surface, which is directionally transformed by ion-bombarded SiNx thin film. The low-voltage transmittance characteristics and reduced response times indicate that the SiNx-based VA-LCDs have potential for low-power operating and high-speed LCD applications.

Original languageEnglish
Pages (from-to)349-353
Number of pages5
JournalLiquid Crystals
Issue number3
Publication statusPublished - 2011 Mar

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics


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