The vertical alignment (VA) of liquid crystal display (LCD) devices with upgraded performance is achieved on ion-bombarded SiNx surfaces. We used a plasma-enhanced chemical vapour deposition method to deposit SiNx thin films with high reliability. X-ray photoelectron spectroscopy revealed that change of orientation of LC molecules occurs on the SiO2 surface, which is directionally transformed by ion-bombarded SiNx thin film. The low-voltage transmittance characteristics and reduced response times indicate that the SiNx-based VA-LCDs have potential for low-power operating and high-speed LCD applications.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics