Au-coated vertical silicon nanowire electrode array (VSNEA) was fabricated using a combination of bottom-up and top-down approaches by chemical vapor deposition and complementary metal-oxide-semiconductor process for biomolecule sensing. To verify the feasibility for the detection of biomolecules, Au-coated VSNEA was functionalized using peptides having a fluorescent probe. Cyclic voltammograms of the peptide-functionalized Au-coated VSNEA show a steady-state electrochemical current behavior. Because of the critically small dimension and vertically aligned nature of VSNEA, the current density of Au-coated VSNEA was dramatically higher than that of Au film electrodes. Au-coated VSNEA further showed a large current difference with and without peptides that was nine times more than that of Au film electrodes. These results indicate that Au-coated VSENA is highly effective device to detect peptides compared to conventional thin-film electrodes. Au-coated VSNEA can also be used as a divergent biosensor platform in many applications.
Bibliographical noteFunding Information:
This work was supported by the National Research Foundation of Korea (NRF) grant, funded by the Korea government (MEST) (no. 2012R1A2A1A03010558, 2012R1A1A2006453, 2012–0000888) and the Pioneer Research Program for Converging Technology (2009-008-1529) through the Korea Science and Engineering Foundation funded by the Ministry of Education, Science & Technology and Seoul R&BD program (ST110029).
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics