Large displacement out-of-plane bimorph actuator for optical application

Won Kyu Jeung, Yong Jun Kim, Seog Moon Choi

Research output: Contribution to journalArticle

Abstract

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a large deflection with relatively small temperature rising. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. The proposed actuator can find applications where a large vertical displacement is needed while keeping compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

Original languageEnglish
Pages (from-to)1383-1386
Number of pages4
JournalKey Engineering Materials
Volume326-328 II
DOIs
Publication statusPublished - 2006

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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