Large scale MoS2 nanosheet logic circuits integrated by photolithography on glass

Hyeokjae Kwon, Pyo Jin Jeon, Jin Sung Kim, Tae Young Kim, Hoyeol Yun, Sang Wook Lee, Takhee Lee, Seongil Im

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

We demonstrate 500 x 500 μm2 large scale polygrain MoS2 nanosheets and field effect transistor (FET) circuits integrated using those nanosheets, which are initially grown on SiO2/p+-Si by chemical vapor deposition but transferred onto glass substrate to be patterned by photolithography. In fact, large scale growth of two-dimensional MoS2 and its conventional way of patterning for integrated devices have remained as one of the unresolved important issues. In the present study, we achieved maximum linear mobility of ∼9 cm2 V-1 s-1 from single-domain MoS2 FET on SiO2/p+-Si substrate and 0.5-3.0 cm2 V-1 s-1 from large scale MoS2 sheet transferred onto glass. Such reduced mobility is attributed to the transfer process-induced wrinkles and crevices, domain boundaries, residue on MoS2, and loss of the back gate-charging effects that might exist due to SiO2/p+-Si substrate. Among 16 MoS2-based FETs, 13 devices successfully work (yield was more than 80%) producing NOT, NOR, and NAND logic circuits. Inverter (NOT gate) shows quite a high voltage gain over 12 at a supply voltage of 5 V, also displaying 60 μs switching speed in kilohertz dynamics.

Original languageEnglish
Article number044001
Journal2D Materials
Volume3
Issue number4
DOIs
Publication statusPublished - 2016 Sep 30

Fingerprint

logic circuits
Nanosheets
Logic circuits
Photolithography
photolithography
Field effect transistors
field effect transistors
Glass
NAND circuits
glass
Substrates
transistor circuits
Electric potential
charging
Integrated circuits
high voltages
Chemical vapor deposition
cracks
vapor deposition
electric potential

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Kwon, Hyeokjae ; Jeon, Pyo Jin ; Kim, Jin Sung ; Kim, Tae Young ; Yun, Hoyeol ; Lee, Sang Wook ; Lee, Takhee ; Im, Seongil. / Large scale MoS2 nanosheet logic circuits integrated by photolithography on glass. In: 2D Materials. 2016 ; Vol. 3, No. 4.
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Large scale MoS2 nanosheet logic circuits integrated by photolithography on glass. / Kwon, Hyeokjae; Jeon, Pyo Jin; Kim, Jin Sung; Kim, Tae Young; Yun, Hoyeol; Lee, Sang Wook; Lee, Takhee; Im, Seongil.

In: 2D Materials, Vol. 3, No. 4, 044001, 30.09.2016.

Research output: Contribution to journalArticle

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