Large step-phase measurement by a reducedphase triple-illumination interferometer

Behnam Tayebi, Mohammad Reza Jafarfard, Farnaz Sharif, Young Sik Song, Dongsoo Har, Dug Young Kim

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

We present a reduced-phase triple-illumination interferometer (RPTII) as a novel single-shot technique to increase the precision of dualillumination optical phase unwrapping techniques. The technique employs two measurement ranges to record both low-precision unwrapped and highprecision wrapped phases. To unwrap the high-precision phase, a hierarchical optical phase unwrapping algorithm is used with the lowprecision unwrapped phase. The feasibility of this technique is demonstrated by measuring a stepped object with a height 2100 times greater than the wavelength of the source. The phase is reconstructed without applying any numerical unwrapping algorithms, and its noise level is decreased by a factor of ten.

Original languageEnglish
Pages (from-to)11264-11271
Number of pages8
JournalOptics Express
Volume23
Issue number9
DOIs
Publication statusPublished - 2015 May 4

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All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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