Laser-direct patterning of nanostructured metal thin films

Hyunkwon Shin, Hyeongjae Lee, Hyeonggeun Yoo, Ki Soo Lim, Myeongkyu Lee

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

We here describe the laser-direct patterning of nanostructured metal thin films. This method involves light-matter interaction in which a pulsed laser beam impinging on the film generates a thermo-elastic force that plays a role to detach the film from the substrate or underlying layers. A moderate cohesion of the nanostructured film enables localized desorption of the material upon irradiation by a spatially-modulated laser beam, giving good fidelity with the transfered pattern. This photoresist-free process provides a simple high-resolution scheme for patterning metal thin films.

Original languageEnglish
Pages (from-to)163-168
Number of pages6
JournalJournal of Korean Institute of Metals and Materials
Volume48
Issue number2
DOIs
Publication statusPublished - 2010 Feb

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Modelling and Simulation
  • Surfaces, Coatings and Films
  • Metals and Alloys

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