Laser-driven high-resolution patterning of indium tin oxide thin film for electronic device

Hyunkwon Shin, Boyeon Sim, Myeongkyu Lee

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

We here introduce a laser-driven process to pattern transparent thin films on transparent substrates. This method utilizes a pre-patterned metal film as the dynamic release layer and the transparent thin film is selectively removed by a thermo-elastic force laser-induced in the underlying metal layer. High-fidelity indium tin oxide (ITO) thin film patterns were fabricated on plastic and glass substrates using a pulsed Nd:YAG laser. Tens of square centimeters could be patterned with several pulse shots. We fabricated a pentacene thin film transistor with ITO source and drain electrodes and observed a very low off-current level. This tells that the channel area between ITO electrodes was completely etched out by this laser-driven process. Combined with the absence of photoresist and chemical etching steps, this method provides a simple high-resolution route to pattern transparent thin films over large areas at low temperatures.

Original languageEnglish
Pages (from-to)816-820
Number of pages5
JournalOptics and Lasers in Engineering
Volume48
Issue number7-8
DOIs
Publication statusPublished - 2010 Jul 1

Fingerprint

Tin oxides
indium oxides
Indium
tin oxides
Oxide films
Thin films
Lasers
high resolution
thin films
electronics
lasers
Metals
Electrodes
Substrates
Photoresists
Thin film transistors
electrodes
Etching
metal films
photoresists

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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Laser-driven high-resolution patterning of indium tin oxide thin film for electronic device. / Shin, Hyunkwon; Sim, Boyeon; Lee, Myeongkyu.

In: Optics and Lasers in Engineering, Vol. 48, No. 7-8, 01.07.2010, p. 816-820.

Research output: Contribution to journalArticle

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