Laser-Induced Phase Transition and Patterning of hBN-Encapsulated Mo Te2

Huije Ryu, Yunah Lee, Jae Hwan Jeong, Yangjin Lee, Yeryun Cheon, Kenji Watanabe, Takashi Taniguchi, Kwanpyo Kim, Hyeonsik Cheong, Chul Ho Lee, Gwan Hyoung Lee

Research output: Contribution to journalArticlepeer-review


Transition metal dichalcogenides exhibit phase transitions through atomic migration when triggered by various stimuli, such as strain, doping, and annealing. However, since atomically thin 2D materials are easily damaged and evaporated from these strategies, studies on the crystal structure and composition of transformed 2D phases are limited. Here, the phase and composition change behavior of laser-irradiated molybdenum ditelluride (MoTe2) in various stacked geometry are investigated, and the stable laser-induced phase patterning in hexagonal boron nitride (hBN)-encapsulated MoTe2 is demonstrated. When air-exposed or single-side passivated 2H-MoTe2 are irradiated by a laser, MoTe2 is transformed into Te or Mo3Te4 due to the highly accumulated heat and atomic evaporation. Conversely, hBN-encapsulated 2H-MoTe2 transformed into a 1T′ phase without evaporation or structural degradation, enabling stable phase transitions in desired regions. The laser-induced phase transition shows layer number dependence; thinner MoTe2 has a higher phase transition temperature. From the stable phase patterning method, the low contact resistivity of 1.13 kΩ µm in 2H-MoTe2 field-effect transistors with 1T′ contacts from the seamless heterophase junction geometry is achieved. This study paves an effective way to fabricate monolithic 2D electronic devices with laterally stitched phases and provides insights into phase and compositional changes in 2D materials.

Original languageEnglish
Publication statusAccepted/In press - 2023

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation (NRF) of Korea Grant funded by the Korean Government (2021R1A2C3014316, 2021M3F3A2A01037858, and 2017R1A5A1014862 (SRC program: vdWMRC center) and the Creative‐Pioneering Researchers Program through Seoul National University (SNU). Y. L. and K.K. acknowledge support by the Basic Science Research Program at the NRF (2017R1A5A1014862, 2022R1A2C4002559) and the Institute for Basic Science (IBS‐R026‐D1). G.H.L. acknowledges the support from the Research Institute of Advanced Materials (RIAM), Institute of Engineering Research (IER), Institute of Applied Physics (IAP), and Inter‐University Semiconductor Research Center (ISRC) at the Seoul National University.

Publisher Copyright:
© 2023 Wiley-VCH GmbH.

All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Chemistry(all)
  • Biomaterials
  • Materials Science(all)


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