Laser interference-driven fabrication of regular inverted-pyramid texture on mono-crystalline Si

Bogeum Yang, Myeongkyu Lee

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


We show that inverted-pyramid (IP) textures can be fabricated on mono-crystalline Si wafer by laser interference combined with alkali etching. When exposed to three interfering nanosecond-laser beams at 532 nm, the surface was periodically melted in accordance with the interference pattern, generating concave holes. Subsequent etching with a KOH solution revealed IP structures as a result of the anisotropic etching. It was found that not only the etching condition but also the in-plane orientation relationship of interfering beams is an important factor to fabricate low-reflectance, uniform IP textures. An average reflectance less than 20% was obtained over the spectral range of 400 nm to 1 μm. This mask-free process may be effectively utilized for the production of low-cost, high-efficiency crystalline Si solar cells.

Original languageEnglish
Pages (from-to)52-56
Number of pages5
JournalMicroelectronic Engineering
Publication statusPublished - 2014 Nov 25

Bibliographical note

Funding Information:
This work was supported by the New & Renewable Energy Program of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government Ministry of Knowledge Economy (Grant: 20103020010080 ).

Publisher Copyright:
© 2014 Elsevier B.V. All rights reserved.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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