Laser pyrolysis of imprinted furan pattern for the precise fabrication of microsupercapacitor electrodes

Jina Jang, Jeong Woo Yeom, Won Kyu Kang, Muhammad Refatul Haq, Xun Lu, Dongjun Shin, Seok Min Kim, Jung Bin In

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

The design or dimension of micro-supercapacitor electrodes is an important factor that determines their performance. In this study, a microsupercapacitor was precisely fabricated on a silicon substrate by irradiating an imprinted furan micropattern with a CO2 laser beam under ambient conditions. Since furan is a carbon-abundant polymer, electrically conductive and porous carbon structures were produced by laser-induced pyrolysis. While the pyrolysis of a furan film in a general electric furnace resulted in severe cracks and delamination, the laser pyrolysis method proposed herein yielded porous carbon films without cracks or delamination. Moreover, as the imprinting process already designated the furan area for laser pyrolysis, high-precision patterning was achieved in the subsequent laser pyrolysis step. This two-step process exploited the superior resolution of imprinting for the fabrication of a laser-pyrolyzed carbon micropattern. As a result, the technical limitations of conventional laser direct writing could be overcome. The laser-pyrolyzed carbon structure was employed for microsupercapacitor electrodes. The microsupercapacitor showed a specific capacitance of 0.92 mF/cm2 at 1 mA/cm2 with a PVA-H2SO4 gel electrolyte, and retained an up to 88% capacitance after 10,000 charging/discharging cycles.

Original languageEnglish
Article number746
JournalMicromachines
Volume11
Issue number8
DOIs
Publication statusPublished - 2020 Aug

Bibliographical note

Funding Information:
Funding: This research was supported by the Industrial Technology Innovation Program (No. 20007058, Development of safe and comfortable human augmentation hybrid robot suit) funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea); and by the Nano·Material Technology Development Program through the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (NRF-2016M3A7B4910532).

Publisher Copyright:
© 2020 by the authors.

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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