Layer-controlled, wafer-scale, and conformal synthesis of tungsten disulfide nanosheets using atomic layer deposition

Jeong Gyu Song, Jusang Park, Wonseon Lee, Taejin Choi, Hanearl Jung, Chang Wan Lee, Sung Hwan Hwang, Jae Min Myoung, Jae Hoon Jung, Soo Hyun Kim, Clement Lansalot-Matras, Hyungjun Kim

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