Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring

Jungwook Choi, Soonjae Pyo, Jae Ik Lee, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages1324-1327
Number of pages4
DOIs
Publication statusPublished - 2012 May 7
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 2012 Jan 292012 Feb 2

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CountryFrance
CityParis
Period12/1/2912/2/2

Fingerprint

Carbon Nanotubes
Carbon nanotubes
carbon nanotubes
synthesis
alignment
Compressive stress
Raman spectroscopy
Chemical vapor deposition
stiffness
Electron microscopes
electron microscopes
Stiffness
vapor deposition
Scanning
scanning

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Choi, J., Pyo, S., Lee, J. I., & Kim, J. (2012). Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1324-1327). [6170402] https://doi.org/10.1109/MEMSYS.2012.6170402
Choi, Jungwook ; Pyo, Soonjae ; Lee, Jae Ik ; Kim, Jongbaeg. / Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. pp. 1324-1327
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Choi, J, Pyo, S, Lee, JI & Kim, J 2012, Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170402, pp. 1324-1327, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 12/1/29. https://doi.org/10.1109/MEMSYS.2012.6170402

Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. / Choi, Jungwook; Pyo, Soonjae; Lee, Jae Ik; Kim, Jongbaeg.

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1324-1327 6170402.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.

AB - We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.

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Choi J, Pyo S, Lee JI, Kim J. Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1324-1327. 6170402 https://doi.org/10.1109/MEMSYS.2012.6170402