Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring

Jungwook Choi; Soonjae Pyo; Jae Ik Lee; Jongbaeg Kim

doi:10.1109/MEMSYS.2012.6170402

Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring

Jungwook Choi, Soonjae Pyo, Jae Ik Lee, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	1324-1327
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170402
Publication status	Published - 2012
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 2012 Jan 29 → 2012 Feb 2

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	12/1/29 → 12/2/2

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2012.6170402

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Choi, J., Pyo, S., Lee, J. I., & Kim, J. (2012). Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1324-1327). [6170402] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170402

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title = "Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring",

abstract = "We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.",

author = "Jungwook Choi and Soonjae Pyo and Lee, {Jae Ik} and Jongbaeg Kim",

year = "2012",

doi = "10.1109/MEMSYS.2012.6170402",

language = "English",

isbn = "9781467303248",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "1324--1327",

booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",

note = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 ; Conference date: 29-01-2012 Through 02-02-2012",

}

Choi, J, Pyo, S, Lee, JI & Kim, J 2012, Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170402, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1324-1327, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 12/1/29. https://doi.org/10.1109/MEMSYS.2012.6170402

Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. / Choi, Jungwook; Pyo, Soonjae; Lee, Jae Ik et al.

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1324-1327 6170402 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.

AB - We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.

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M3 - Conference contribution

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

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Choi J, Pyo S, Lee JI, Kim J. Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1324-1327. 6170402. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2012.6170402

Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring

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