This paper presents the design, fabrication, and testing of two linear stages for next generation precision mechatronic motion systems such as in semiconductor photolithography machines. We have designed a new linear iron-core permanent-magnet motor that can simultaneously achieve high force and low noise, providing a promising candidate for actuating systems for high-throughput and high-precision servo applications. The vibro-acoustic noise mechanism of linear iron-core synchronous motors and a new magnetic design approach to mitigate such noise issue are presented in this paper, along with the experimental validation of significant higher-force and lower-noise performance as compared to a conventional linear iron-core motor. In this paper, we also present another type of novel linear stage for in-vacuum transportation tasks in precision manufacturing systems. This new linear stage system is driven by a hysteresis motor and magnetically-levitated with two-degrees-of-freedom (DOF) active bearing controls and three-DOF passive magnetic bearings. This paper discusses the design, operating principles, and experimental results of this magnetically levitated linear motor system.
|Title of host publication||Proceedings of the 2019 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2019|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||7|
|Publication status||Published - 2019 Jul|
|Event||2019 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2019 - Hong Kong, China|
Duration: 2019 Jul 8 → 2019 Jul 12
|Name||IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM|
|Conference||2019 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2019|
|Period||19/7/8 → 19/7/12|
Bibliographical noteFunding Information:
This work is supported by ASML.
© 2019 IEEE.
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
- Control and Systems Engineering
- Computer Science Applications