Liquid crystal alignment effects on SiNx thin film layers treated by ion-beam irradiation

Sang Keuk Lee, Jong Hwan Kim, Byeong Yun Oh, Dong Hun Kang, Byoung Yong Kim, Jin Woo Han, Young Hwan Kim, Jeong Min Han, Jeoung Yeon Hwang, Chul Ho Ok, Dae Shik Seo

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Nematic liquid crystal (NLC) alignment effects on SiNx thin film layers treated by ion-beam irradiation for three types of N ratio were successfully studied for the first time. The SiNx thin film was deposited by plasma-enhanced chemical vapor deposition using three types of N ratio. To characterize the film, atomic force microscopy was performed. Good LC aligning capabilities on the SiNx thin film treated by ion-beam irradiation for all N ratios can be achieved. The low pretilt angle for an NLC on the SiNx thin film treated by ion-beam irradiation was observed and could be adopted in planar alignment liquid crystal display applications as in-plane switching and fringe-field switching modes.

Original languageEnglish
Pages (from-to)7711-7713
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number12
DOIs
Publication statusPublished - 2007 Dec 6

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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