Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform

Yongkeun Oh, Dae Sung Kwon, Wondo Kim, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we propose a location-specific batch fabrication process to form suspended metal nanowire between two microelectrodes. This simple and low temperature fabrication method consists of 3 steps; electrospinning polymer nanofibers on MEMS platform with micro gap, metal evaporation, and dissolving polymer nanofibers in liquid and drying. Here we demonstrate the proposed process with Pd to form suspended Pd nanowire, for the possible future application as hydrogen sensor. The surface tension force during the drying enables the formation of single wire from multiple wires. The proposed method allows diverse choice of nanowire material and thus can find various applications of two-terminal nanowire devices.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages494-497
Number of pages4
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018 Apr 24
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 2018 Jan 212018 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Oh, Y., Kwon, D. S., Kim, W., & Kim, J. (2018). Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 494-497). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346597