Low dark current CMOS image sensor pixel with photodiode structure enclosed by P-well

S. W. Han, E. Yoon

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

A low dark current CMOS image sensor pixel which can be easily implemented using a standard CMOS technology without any process modification is presented. Dark current is mainly generated from the interface region between the shallow trench isolation (STI) and the active region. The proposed pixel can reduce dark current by separating the STI region from a photodiode, using a simple layout modification to enclose the photodiode junction with the P-well. A test sensor array has been fabricated using 0.18m standard CMOS process and its performance characterised. The dark current of the proposed pixel has been measured as 0.93fA/pixel, which is by a factor of two smaller than that of the conventional design.

Original languageEnglish
Pages (from-to)1145-1146
Number of pages2
JournalElectronics Letters
Volume42
Issue number20
DOIs
Publication statusPublished - 2006 Oct 9

Fingerprint

Dark currents
Photodiodes
Image sensors
Pixels
Sensor arrays

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

@article{9dff10457b384d61a74e39346f9187fb,
title = "Low dark current CMOS image sensor pixel with photodiode structure enclosed by P-well",
abstract = "A low dark current CMOS image sensor pixel which can be easily implemented using a standard CMOS technology without any process modification is presented. Dark current is mainly generated from the interface region between the shallow trench isolation (STI) and the active region. The proposed pixel can reduce dark current by separating the STI region from a photodiode, using a simple layout modification to enclose the photodiode junction with the P-well. A test sensor array has been fabricated using 0.18m standard CMOS process and its performance characterised. The dark current of the proposed pixel has been measured as 0.93fA/pixel, which is by a factor of two smaller than that of the conventional design.",
author = "Han, {S. W.} and E. Yoon",
year = "2006",
month = "10",
day = "9",
doi = "10.1049/el:20061652",
language = "English",
volume = "42",
pages = "1145--1146",
journal = "Electronics Letters",
issn = "0013-5194",
publisher = "Institution of Engineering and Technology",
number = "20",

}

Low dark current CMOS image sensor pixel with photodiode structure enclosed by P-well. / Han, S. W.; Yoon, E.

In: Electronics Letters, Vol. 42, No. 20, 09.10.2006, p. 1145-1146.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Low dark current CMOS image sensor pixel with photodiode structure enclosed by P-well

AU - Han, S. W.

AU - Yoon, E.

PY - 2006/10/9

Y1 - 2006/10/9

N2 - A low dark current CMOS image sensor pixel which can be easily implemented using a standard CMOS technology without any process modification is presented. Dark current is mainly generated from the interface region between the shallow trench isolation (STI) and the active region. The proposed pixel can reduce dark current by separating the STI region from a photodiode, using a simple layout modification to enclose the photodiode junction with the P-well. A test sensor array has been fabricated using 0.18m standard CMOS process and its performance characterised. The dark current of the proposed pixel has been measured as 0.93fA/pixel, which is by a factor of two smaller than that of the conventional design.

AB - A low dark current CMOS image sensor pixel which can be easily implemented using a standard CMOS technology without any process modification is presented. Dark current is mainly generated from the interface region between the shallow trench isolation (STI) and the active region. The proposed pixel can reduce dark current by separating the STI region from a photodiode, using a simple layout modification to enclose the photodiode junction with the P-well. A test sensor array has been fabricated using 0.18m standard CMOS process and its performance characterised. The dark current of the proposed pixel has been measured as 0.93fA/pixel, which is by a factor of two smaller than that of the conventional design.

UR - http://www.scopus.com/inward/record.url?scp=33749327594&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33749327594&partnerID=8YFLogxK

U2 - 10.1049/el:20061652

DO - 10.1049/el:20061652

M3 - Article

AN - SCOPUS:33749327594

VL - 42

SP - 1145

EP - 1146

JO - Electronics Letters

JF - Electronics Letters

SN - 0013-5194

IS - 20

ER -