Low phase noise CMOS distributed oscillators using mems low loss transmission lines

Eun Chul Park, Taek Sang Song, Sang Hyun Baek, Euisik Yoon

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

For the first time, low noise distributed oscillators for millimeter wave signal generation have been realized by using fully IC compatible, monolithically-integrable 3-D RF MEMS transmission lines. The active core circuits of the distributed oscillators have been fabricated using 0.18 μm CMOS processes. On the top of this CMOS circuits, low-loss MEMS transmission lines have been monolithically integrated suspending by 25 μm. Phase noise of the fabricated MEMS distributed oscillators has been measured as -125.7dBc/Hz at 1MHz offset frequency from oscillation frequency of 13GHz. This is the lowest phase noise ever reported on distributed oscillators implemented in CMOS technology.

Original languageEnglish
Pages (from-to)645-648
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2004 Jul 19
Event17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
Duration: 2004 Jan 252004 Jan 29

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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