Low power micro-gas sensors using mixed SnO2 nanoparticles and MWCNTs to detect NO2, NH3, and xylene gases for ubiquitous sensor network applications

Kwang Yong Choi, Joon Shik Park, Kwang Bum Park, Hyun Jae Kim, Hyo Derk Park, Seong Dong Kim

Research output: Contribution to journalArticle

63 Citations (Scopus)

Abstract

Using mixed SnO2 nanoparticles with 1 wt.% MWCNTs sensing materials, NO2, NH3, and xylene gas sensors were fabricated on micro-platforms. A micro-platform consists of micro-sensing electrode and micro-heater on 2 μm thick SiNx membrane. The fabricated gas sensors were characterized to NO2, NH3, and xylene gases, respectively, as a function of concentration at 300 °C and temperature from 180 °C to 380 °C at constant concentration. The measured highest sensitivities for the NO2, NH3, and xylene were 1.06 at 1.2 ppm and 220 °C, 0.19 at 60 ppm, and 220 °C, and 0.15 at 3.6 ppm and 220 °C, respectively. So, it was found that 220 °C was the optimum temperature to have the best sensitivities. From these results, mixed SnO2 nanoparticles with 1 wt.% MWCNTs showed good sensitivity and selectivity at low power operation below 30 mW. Fabricated micro-gas sensors could be used for ubiquitous sensor network applications to monitor environmental pollutants in the air.

Original languageEnglish
Pages (from-to)65-72
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume150
Issue number1
DOIs
Publication statusPublished - 2010 Oct 21

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this