TY - JOUR
T1 - Low-Temperature, aqueous-solution-processed zinc tin oxide thin film transistor
AU - Park, Jee Ho
AU - Choi, Won Jin
AU - Oh, Jin Young
AU - Chae, Soo Sang
AU - Jang, Woo Soon
AU - Lee, Se Jong
AU - Song, Kie Moon
AU - Baik, Hong Koo
PY - 2011/7
Y1 - 2011/7
N2 - We fabricate solution-processed zinc tin oxide (ZTO) thin-film transistors (TFTs). The solution used is prepared by precipitating metal hydroxide using NaOH and dissolving it using NH4OH. The X-ray diffraction (XRD) data of the spin-coated ZTO film demonstrates an amorphous phase, and the atomic force microscopy (AFM) image shows a smooth surface. The device performance of solution-processed TFTs was analyzed as a function of annealing temperature. The fabricated TFTs were operated in the enhancement mode, and exhibited a carrier mobility of 3.03 cm2 V-1 s-1, a threshold voltage of 10.2 V, an on/off current ratio of 1.23 × 107, a subthreshold slope of 0.78 V/decade, and high transparency (with ∼ransmittance) at a low annealing temperature of 300 °C.
AB - We fabricate solution-processed zinc tin oxide (ZTO) thin-film transistors (TFTs). The solution used is prepared by precipitating metal hydroxide using NaOH and dissolving it using NH4OH. The X-ray diffraction (XRD) data of the spin-coated ZTO film demonstrates an amorphous phase, and the atomic force microscopy (AFM) image shows a smooth surface. The device performance of solution-processed TFTs was analyzed as a function of annealing temperature. The fabricated TFTs were operated in the enhancement mode, and exhibited a carrier mobility of 3.03 cm2 V-1 s-1, a threshold voltage of 10.2 V, an on/off current ratio of 1.23 × 107, a subthreshold slope of 0.78 V/decade, and high transparency (with ∼ransmittance) at a low annealing temperature of 300 °C.
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U2 - 10.1143/JJAP.50.070201
DO - 10.1143/JJAP.50.070201
M3 - Article
AN - SCOPUS:79960695225
SN - 0021-4922
VL - 50
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 7 PART 1
M1 - 070201
ER -