Low-temperature deposition of highly [100]-oriented MgO films using charged liquid cluster beam

S. H. Rhee, Y. Yang, H. S. Choi, J. M. Myoung, K. Kim

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30 Citations (Scopus)

Abstract

Charged liquid cluster beam (CLCB) of a precursor solution has been employed to deposit highly [100]-oriented MgO films with full oxygen content on Si (111) and glass in air at a very low temperature (≤400°C). Flow-limited field-injection electrostatic spraying was invoked to produce charged nanometer-size drops (liquid clusters) of the precursor solution. This solution was prepared by sol-gel processing of magnesium acetate in ethanol. The morphology, surface atomic ratio of Mg and O, and carbon impurity concentration of the films were studied using scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), and Rutherford backscattering (RBS). The MgO films started to crystallize in the [100] direction below 300°C and became more highly oriented with increasing temperature. Addition of triethyleneglycol to the precursor solution reduced the surface roughness of the films at high substrate temperatures. This technique is applicable to large-area coating.

Original languageEnglish
Pages (from-to)23-28
Number of pages6
JournalThin Solid Films
Volume396
Issue number1-2
DOIs
Publication statusPublished - 2001 Sep 21

Bibliographical note

Funding Information:
Contributions by Dr Haipeng Tang at the initial stage of this work are gratefully acknowledged. This work was supported by LG Electronics, the National Science Foundation (CHE-9973575), and the Beckman Institute for Advanced Science and Technology. The microanalysis contained in this work was carried out in the Center for Microanalysis of Materials, University of Illinois, which is partially supported by the US Department of Energy under grant DEFG02-96-ER45439.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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