@inproceedings{a0ab4b0deb044c189750f3a44fa16c84,
title = "Low temperature O2 plasma-assisted wafer bonding of InP and a garnet crystal for an optical waveguide isolator",
abstract = "A novel process of wafer bonding between InP and a garnet crystal (Gd 3Ga5O12, CeY2Fe5O 12) based on O2 plasma surface-activation and low temperature heat treatment is presented. The O2 plasma assisted wafer bonding process was found to be very effective in bonding of InP and Gd 3Ga5O12, providing good bonding strength and hydrophilicity as well as no voids in the interface, which is crucial for fabrication of an integrated optical waveguide isolator. The isolation ratio of an integrated optical waveguide isolator fabricated by the O2 plasma assisted wafer bonding process was obtained to be 2.9 dB.",
author = "Roh, {J. W.} and Yang, {J. S.} and Ok, {S. H.} and Woo, {D. H.} and Byun, {Y. T.} and Jhon, {Y. M.} and T. Mizumoto and Lee, {W. Y.} and S. Lee",
year = "2007",
doi = "10.4028/3-908451-31-0.475",
language = "English",
isbn = "3908451310",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
number = "PART 1",
pages = "475--478",
booktitle = "Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia",
edition = "PART 1",
note = "IUMRS International Conference in Asia 2006, IUMRS-ICA 2006 ; Conference date: 10-09-2006 Through 14-09-2006",
}