Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor

Yuxi Zhao, Jeong Gyu Song, Gyeong Hee Ryu, Kyung Yong Ko, Whang Je Woo, Youngjun Kim, Donghyun Kim, Jun Hyung Lim, Sunhee Lee, Zonghoon Lee, Jusang Park, Hyungjun Kim

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

The efficient synthesis of two-dimensional molybdenum disulfide (2D MoS2) at low temperatures is essential for use in flexible devices. In this study, 2D MoS2 was grown directly at a low temperature of 200 °C on both hard (SiO2) and soft substrates (polyimide (PI)) using chemical vapor deposition (CVD) with Mo(CO)6 and H2S. We investigated the effect of the growth temperature and Mo concentration on the layered growth by Raman spectroscopy and microscopy. 2D MoS2 was grown by using low Mo concentration at a low temperature. Through optical microscopy, Raman spectroscopy, X-ray photoemission spectroscopy, photoluminescence, and transmission electron microscopy measurements, MoS2 produced by low-temperature CVD was determined to possess a layered structure with good uniformity, stoichiometry, and a controllable number of layers. Furthermore, we demonstrated the realization of a 2D MoS2-based flexible gas sensor on a PI substrate without any transfer processes, with competitive sensor performance and mechanical durability at room temperature. This fabrication process has potential for burgeoning flexible and wearable nanotechnology applications.

Original languageEnglish
Pages (from-to)9338-9345
Number of pages8
JournalNanoscale
Volume10
Issue number19
DOIs
Publication statusPublished - 2018 May 21

Fingerprint

Chemical sensors
Plastics
Substrates
Polyimides
Raman spectroscopy
Chemical vapor deposition
Temperature
Growth temperature
Photoelectron spectroscopy
X ray spectroscopy
Nanotechnology
Stoichiometry
Molybdenum
Optical microscopy
Photoluminescence
Microscopic examination
Durability
Transmission electron microscopy
Fabrication
Sensors

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

Cite this

Zhao, Y., Song, J. G., Ryu, G. H., Ko, K. Y., Woo, W. J., Kim, Y., ... Kim, H. (2018). Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor. Nanoscale, 10(19), 9338-9345. https://doi.org/10.1039/c8nr00108a
Zhao, Yuxi ; Song, Jeong Gyu ; Ryu, Gyeong Hee ; Ko, Kyung Yong ; Woo, Whang Je ; Kim, Youngjun ; Kim, Donghyun ; Lim, Jun Hyung ; Lee, Sunhee ; Lee, Zonghoon ; Park, Jusang ; Kim, Hyungjun. / Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor. In: Nanoscale. 2018 ; Vol. 10, No. 19. pp. 9338-9345.
@article{6030911b13f5494e9609b3f96697f997,
title = "Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor",
abstract = "The efficient synthesis of two-dimensional molybdenum disulfide (2D MoS2) at low temperatures is essential for use in flexible devices. In this study, 2D MoS2 was grown directly at a low temperature of 200 °C on both hard (SiO2) and soft substrates (polyimide (PI)) using chemical vapor deposition (CVD) with Mo(CO)6 and H2S. We investigated the effect of the growth temperature and Mo concentration on the layered growth by Raman spectroscopy and microscopy. 2D MoS2 was grown by using low Mo concentration at a low temperature. Through optical microscopy, Raman spectroscopy, X-ray photoemission spectroscopy, photoluminescence, and transmission electron microscopy measurements, MoS2 produced by low-temperature CVD was determined to possess a layered structure with good uniformity, stoichiometry, and a controllable number of layers. Furthermore, we demonstrated the realization of a 2D MoS2-based flexible gas sensor on a PI substrate without any transfer processes, with competitive sensor performance and mechanical durability at room temperature. This fabrication process has potential for burgeoning flexible and wearable nanotechnology applications.",
author = "Yuxi Zhao and Song, {Jeong Gyu} and Ryu, {Gyeong Hee} and Ko, {Kyung Yong} and Woo, {Whang Je} and Youngjun Kim and Donghyun Kim and Lim, {Jun Hyung} and Sunhee Lee and Zonghoon Lee and Jusang Park and Hyungjun Kim",
year = "2018",
month = "5",
day = "21",
doi = "10.1039/c8nr00108a",
language = "English",
volume = "10",
pages = "9338--9345",
journal = "Nanoscale",
issn = "2040-3364",
publisher = "Royal Society of Chemistry",
number = "19",

}

Zhao, Y, Song, JG, Ryu, GH, Ko, KY, Woo, WJ, Kim, Y, Kim, D, Lim, JH, Lee, S, Lee, Z, Park, J & Kim, H 2018, 'Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor', Nanoscale, vol. 10, no. 19, pp. 9338-9345. https://doi.org/10.1039/c8nr00108a

Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor. / Zhao, Yuxi; Song, Jeong Gyu; Ryu, Gyeong Hee; Ko, Kyung Yong; Woo, Whang Je; Kim, Youngjun; Kim, Donghyun; Lim, Jun Hyung; Lee, Sunhee; Lee, Zonghoon; Park, Jusang; Kim, Hyungjun.

In: Nanoscale, Vol. 10, No. 19, 21.05.2018, p. 9338-9345.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor

AU - Zhao, Yuxi

AU - Song, Jeong Gyu

AU - Ryu, Gyeong Hee

AU - Ko, Kyung Yong

AU - Woo, Whang Je

AU - Kim, Youngjun

AU - Kim, Donghyun

AU - Lim, Jun Hyung

AU - Lee, Sunhee

AU - Lee, Zonghoon

AU - Park, Jusang

AU - Kim, Hyungjun

PY - 2018/5/21

Y1 - 2018/5/21

N2 - The efficient synthesis of two-dimensional molybdenum disulfide (2D MoS2) at low temperatures is essential for use in flexible devices. In this study, 2D MoS2 was grown directly at a low temperature of 200 °C on both hard (SiO2) and soft substrates (polyimide (PI)) using chemical vapor deposition (CVD) with Mo(CO)6 and H2S. We investigated the effect of the growth temperature and Mo concentration on the layered growth by Raman spectroscopy and microscopy. 2D MoS2 was grown by using low Mo concentration at a low temperature. Through optical microscopy, Raman spectroscopy, X-ray photoemission spectroscopy, photoluminescence, and transmission electron microscopy measurements, MoS2 produced by low-temperature CVD was determined to possess a layered structure with good uniformity, stoichiometry, and a controllable number of layers. Furthermore, we demonstrated the realization of a 2D MoS2-based flexible gas sensor on a PI substrate without any transfer processes, with competitive sensor performance and mechanical durability at room temperature. This fabrication process has potential for burgeoning flexible and wearable nanotechnology applications.

AB - The efficient synthesis of two-dimensional molybdenum disulfide (2D MoS2) at low temperatures is essential for use in flexible devices. In this study, 2D MoS2 was grown directly at a low temperature of 200 °C on both hard (SiO2) and soft substrates (polyimide (PI)) using chemical vapor deposition (CVD) with Mo(CO)6 and H2S. We investigated the effect of the growth temperature and Mo concentration on the layered growth by Raman spectroscopy and microscopy. 2D MoS2 was grown by using low Mo concentration at a low temperature. Through optical microscopy, Raman spectroscopy, X-ray photoemission spectroscopy, photoluminescence, and transmission electron microscopy measurements, MoS2 produced by low-temperature CVD was determined to possess a layered structure with good uniformity, stoichiometry, and a controllable number of layers. Furthermore, we demonstrated the realization of a 2D MoS2-based flexible gas sensor on a PI substrate without any transfer processes, with competitive sensor performance and mechanical durability at room temperature. This fabrication process has potential for burgeoning flexible and wearable nanotechnology applications.

UR - http://www.scopus.com/inward/record.url?scp=85047262685&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85047262685&partnerID=8YFLogxK

U2 - 10.1039/c8nr00108a

DO - 10.1039/c8nr00108a

M3 - Article

AN - SCOPUS:85047262685

VL - 10

SP - 9338

EP - 9345

JO - Nanoscale

JF - Nanoscale

SN - 2040-3364

IS - 19

ER -

Zhao Y, Song JG, Ryu GH, Ko KY, Woo WJ, Kim Y et al. Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor. Nanoscale. 2018 May 21;10(19):9338-9345. https://doi.org/10.1039/c8nr00108a