Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection

Han Il Jung, Soonjae Pyo, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We have demonstrated field-ionization gas sensor using suspended silver nanowires as electrodes. The tight gap of 1.5 μm between two facing sets of suspended in-plane nanowires on top of silicon microelectrodes, as well as the sharp protrusion of nanowires, allows the generation of high and non-uniform electric field. This produces field emission of electrons that result in ionization of gas molecules at a very low voltage applied. The fabricated sensor could detect toluene at 1.5 V of operational voltage, which is 10 times lower than the existing ionization gas sensors. Resultantly, extremely low power consumption of 75 nW for toluene sensing is also achieved, which implies the proposed field-ionization gas sensor could be a strong candidate for mobile device application.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages195-198
Number of pages4
ISBN (Electronic)9781509050789
DOIs
Publication statusPublished - 2017 Feb 23
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 2017 Jan 222017 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period17/1/2217/1/26

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Jung, H. I., Pyo, S., & Kim, J. (2017). Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 195-198). [7863374] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863374