LTPS (Low Temperature Poly Si) technology based on SLS (Sequential Lateral Solidification) crystallization for advanced mobile display

Myung Koo Kang, Hyunjae Kim, Chiwoo Kim, Hyungguel Kim

Research output: Contribution to journalConference article

Abstract

LTPS technology based on SLS Crystallization was intensively reviewed. LTPS structure produced by SLS crystallization is composed of much larger grains compared with conventional ELA crystallization structure, which can give higher TFT performances. However, TFT performance uniformity and anisotropy problem should be solved for it to be used in mass production. TFT performance uniformity was from main grain boundary position and could be solved by equal defect area structure (EDAS). TFT performance anisotropy could be also solved by multi-channel (MC) structure that can make parallel component in perpendicular channel direction. The higher TFT performances from SLS technology can make superior optical and/or electrical properties and has been adopted in mass production successfully.

Original languageEnglish
Pages (from-to)1756-1760
Number of pages5
JournalProceedings of International Meeting on Information Display
Volume2006
Publication statusPublished - 2006 Dec 1
EventIMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference - Daegu, Korea, Republic of
Duration: 2006 Aug 222006 Aug 25

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Polysilicon
Solidification
Crystallization
Display devices
Anisotropy
Temperature
Grain boundaries
Electric properties
Defects

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

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abstract = "LTPS technology based on SLS Crystallization was intensively reviewed. LTPS structure produced by SLS crystallization is composed of much larger grains compared with conventional ELA crystallization structure, which can give higher TFT performances. However, TFT performance uniformity and anisotropy problem should be solved for it to be used in mass production. TFT performance uniformity was from main grain boundary position and could be solved by equal defect area structure (EDAS™). TFT performance anisotropy could be also solved by multi-channel (MC) structure that can make parallel component in perpendicular channel direction. The higher TFT performances from SLS technology can make superior optical and/or electrical properties and has been adopted in mass production successfully.",
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LTPS (Low Temperature Poly Si) technology based on SLS (Sequential Lateral Solidification) crystallization for advanced mobile display. / Kang, Myung Koo; Kim, Hyunjae; Kim, Chiwoo; Kim, Hyungguel.

In: Proceedings of International Meeting on Information Display, Vol. 2006, 01.12.2006, p. 1756-1760.

Research output: Contribution to journalConference article

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T1 - LTPS (Low Temperature Poly Si) technology based on SLS (Sequential Lateral Solidification) crystallization for advanced mobile display

AU - Kang, Myung Koo

AU - Kim, Hyunjae

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AU - Kim, Hyungguel

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