Soft magnetic FeTaN and novel FeTaN/AIN multilayer films with a saturation flux density of ∼20 kG are obtained on both planar and sloping substrates. Flat frequency responses extend over 500 MHz for as-deposited 1000 Å-thick FeTaN films. The 3 dB roll-off frequency for as-deposited 1 μm-thick (FeTaN/ AlN)10 laminates is only ∼330 MHz. However, when the laminates are patterned into 20 μm-wide strips along the hard axis, the frequency response improves and the 3 dB roll-off frequency is over 500 MHz, which offers the promise of data rates of over 1 Gb/sec.
Bibliographical noteFunding Information:
Manuscript received March 5, 1999. This work is partially supported by NSF Grant ECS-9710223. Shan X. Wang, (650) 723-8671, fax (650) 725-4034, firstname.lastname@example.org.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering