Magnetically suspended contact-free linear actuator for precision stage

Sang Heon Lee, Yoon Su Baek

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

With the development of precision manufacturing technologies, the importance of precision positioning devices is increasing. Conventional actuators, dual stage or mechanically contacting type, have limitation in coping with performance demands. As a possible solution, magnetic suspension technology was studied. Such a contact-free system has advantages in terms of high accuracy, low production cost and easy adaptability to high precision manufacturing processes. This paper deals with magnetically suspended multi-degrees of freedom actuator which can realize large linear motion. In this paper, the operating principle is explained with the magnetic force analysis, and the equations of motion are derived. Experimental results of the implemented system are also given.

Original languageEnglish
Pages (from-to)708-717
Number of pages10
JournalKSME International Journal
Volume17
Issue number5
DOIs
Publication statusPublished - 2003 May

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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